2010
DOI: 10.18524/1815-7459.2010.4.116318
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Features of Micron-Sized Mesa-Piezoresistor

Abstract: Abstract. The effect of dihedral angles in the junction region of tensoresistive layer to contact pads on strain distribution in mesa-piezoresistor body was studied using the finite element method. Influence of mesa-piezoresistor geometry on its sensitivity was demonstrated.

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