FEM based modeling and optimization of a 2D micro mirror

Abstract

A 2D scanning micro mirror is modelled based on numerical simulations and optimized using the Matlab optimization Toolbox. The simulation model covers structural, fluidic and electrostatic effects. The goals of the optimization are low driving voltages and robustness against process variations. The simulated behaviour of the optimized design is compared to experimental results.

A Novel Gyroscopic Actuation Concept for 2D MEMS Micromirrors

“…To achieve large deflection angles in a MEMS design this leads to either weak spring elements [8], possibly impairing vibration robustness, or the requirement of high forces. If these forces are generated by electrostatic drive concepts, voltages of up to several hundred volts are necessary [7]. An alternative to this is electromagnetic actuation.…”

“…A large percentage of use cases requires or benefits from a 2D MEMS mirror concept that can be deflected about one resonant "fast" horizontal axis and a "slow" vertical static axis to be able to perform a regular multiline scan as depicted in Figure 1a. 2D MEMS micromirrors of this type were under development in several groups recently [1,6,7]. Designing a MEMS micro mirror to achieve a large static amplitude is challenging.…”