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A 2D scanning micro mirror is modelled based on numerical simulations and optimized using the Matlab optimization Toolbox. The simulation model covers structural, fluidic and electrostatic effects. The goals of the optimization are low driving voltages and robustness against process variations. The simulated behaviour of the optimized design is compared to experimental results.

We present a microscanner actuated by self aligned vertical comb drives of high aspect ratio, designed for bidirectional static actuation. A stable rotational angle of ±8° is demonstrated at 290V DC .

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