Microscanner using self aligned vertical comb drives in a switched electrode configuration for large static rotation

Abstract

We present a microscanner actuated by self aligned vertical comb drives of high aspect ratio, designed for bidirectional static actuation. A stable rotational angle of ±8° is demonstrated at 290V DC .

FEM based modeling and optimization of a 2D micro mirror

“…• The x-drive, actuating the oscillation of the mirror plate around the x-axis One can combine the capabilities presented in [2] and [3] in a 2D-Scanner which is able to tilt slowly ( off resonant) around one axis and fast (resonant) around the second axis. Figure 1: The 2D scanning device.…”