FEM modeling of squeeze film damping effect in RF-MEMS switches

Haider, Syed Turab; Saleem, Muhammad Mubasher; Ahmad, M.M.

doi:10.1109/eecsi.2017.8239182

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“…Detail review of the gas rarefaction effects is introduced in [12][13][14]. Recently, Haider et al [15] found that the effective viscosity ( eff  ) changed considerably with temperature and relative humidity of moist air. Therefore, the influences of temperature and relative humidity in gas rarefaction must be carefully considered to improve the Q-factor of MEMS resonators.…”

Section: Introductionmentioning

confidence: 99%

Investigation of Coupled Effects of Temperature and Relative Humidity on Dynamic Performance of Mems Cantilever Resonators in Gas Rarefaction

Cuong

Thang

Phat

et al. 2019

JST

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The modified molecular gas lubrication (MMGL) equation with the effective viscosity of moist air is utilized to solve for the squeeze film damping (SFD) problem on the dynamic performance of MEMS cantilever resonators. Thus, the coupled effects of temperature and relative humidity are discussed on the Q-factors of MEMS cantilever resonators in a wide range of gas rarefaction (pressure, p and accommodation coefficients, ACs) and resonant mode of vibration. The results showed that the Q-factor of moist air decreases more significantly as temperature and relative humidity increase at higher gas rarefaction (lower p, and ACs) conditions.

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