RF micro-electro-mechanical system (MEMS) capacitive switch performance parameters and improvement strategies

Kurmendra,; Kumar, Rajesh

doi:10.1007/s00542-022-05324-6

Cited by 4 publications

(3 citation statements)

References 85 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…These solutions provide an extremely wide operating range of over 100 nm [ 55 ]. However, the authors suggest only geometry changes to provide OAM order tuning, which can only be realized with microelectromechanical systems with relatively high switching time (about 1–2 μs) and control voltage (about 30–40 V) [ 57 ].…”

Section: Discussionmentioning

confidence: 99%

Micro-Ring Resonator-Based Tunable Vortex Beam Emitter

Bakirova,

Voronkov,

Lyubopytov

et al. 2023

Micromachines

View full text Add to dashboard Cite

Light beams bearing orbital angular momentum (OAM) are used in various scientific and engineering applications, such as microscopy, laser material processing, and optical tweezers. Precise topological charge control is crucial for efficiently using vortex beams in different fields, such as information encoding in optical communications and sensor systems. This work presents a novel method for optimizing an emitting micro-ring resonator (MRR) for emitting vortex beams with variable orders of OAM. The MRR consists of a ring waveguide with periodic structures side-coupled to a bus waveguide. The resonator is tunable due to the phase change material Sb2Se3 deposited on the ring. This material can change from amorphous to crystalline while changing its refractive index. In the amorphous phase, it is 3.285 + 0i, while in the transition to the crystalline phase, it reaches 4.050 + 0i at emission wavelength 1550 nm. We used this property to control the vortex beam topological charge. In our study, we optimized the distance between the bus waveguide and the ring waveguide, the bending angle, and the width of the bus waveguide. The optimality criterion was chosen to maximize the flux density of the radiated energy emitted by the resonator. The numerical simulation results proved our method. The proposed approach can be used to optimize optical beam emitters carrying OAM for various applications.

show abstract

Section: Discussionmentioning

confidence: 99%

Micro-Ring Resonator-Based Tunable Vortex Beam Emitter

Bakirova,

Voronkov,

Lyubopytov

et al. 2023

Micromachines

View full text Add to dashboard Cite

show abstract

“…The utilization of cantileverbased microelectromechanical systems (MEMS) switches in radiofrequency (RF) circuits and devices is constrained due to challenges associated with stiction and reliability arising from the metalto-metal contact established in their "bending" configuration. Prior studies have demonstrated that cantilever switches exhibit superior performance in terms of both switching time and release when compared to capacitive switches (Kurmendra and Kumar, 2021a;Kurmendra and Kumar, 2021b;Kumari and Angira, 2022;Kurmendra and Kumar, 2022;XJ He et al, 2012;Koul and Dey, 2022;Riverola et al, 2016a). The efficacy of a coiled microcantilever switch, which exhibits a thermally responsive behavior, was investigated by a team of researchers.…”

Section: Introductionmentioning

confidence: 99%

“…Casimir's force increases as the square root of the inverse of the square of the gap (Koul and Dey, 2022;Duan and Rach, 2013;Tsai and Li, 2022). The boundary value problem (BVP) involving the nano-beam deflection model with dispersed parameters presents a significant challenge in obtaining an analytical solution due to the utilization of Ashby's methodology for the nonlinear governing equation (Lu et al, 2018;Kurmendra and Kumar, 2021b;Kurmendra and Kumar, 2022;Duan and Rach, 2013;Tian et al, 2016). Certain researchers have undertaken a study on the dynamic behavior of nano-scale electrostatic actuators, with a particular focus on incorporating the influence of the van der Waals force.…”

Section: Introductionmentioning

confidence: 99%

Sub-0.3 volt amorphous metal WNx based NEMS switch with 8 trillion cycles

Mayet,

Muqeet,

Alhashim

et al. 2024

Front. Mater.

View full text Add to dashboard Cite

Introduction: The mechanical nature of nanoelectromechanical (NEM) switches makes them sluggish yet desirable for ultra-low-power, harsh environment applications. Two- and three-terminal NEM switches have been demonstrated using onedimensional, two-dimensional, and thin films, but sub-0.3 V operation with improved mechanical and electrical reliability is still elusive.Method: This study presents WNxnano-ribbon-based NEM sensor switches that operate at 0.6 V, 30 nanosecond switching time, 8 trillion cycles, and 0.5 mA ON current with less than 5 kΩ ON resistance, without stiction, mechanical welding, or short circuits. WNx’s high Young’s modulus gives it great elasticity and mechanical restoring force, which may overcome van der Waal and capillary forces.Results and Discussion: With its high Young’s modulus, the device’s nanoscale size facilitated low operating voltage. WNxnano-ribbon without grain boundaries is amorphous and more mechanically strong. Hammering and high current flow may destroy the nano-ribbon contact surface and interface, which is practically immaculate. Pull-out time (dominant delay factor) is 0 owing to high Young’s modulus, hence hysteresis loss and delay are absent. Elasticity and Young’s modulus increase speed.

show abstract

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

Self Cite

View full text Add to dashboard Cite

Micro-Electro-Mechanical System (MEMS) switches have emerged as pivotal components in the realm of miniature electronic devices, promising unprecedented advancements in size, power consumption, and versatility. This literature review paper meticulously examines the key issues and challenges encountered in the development and application of MEMS switches. The comprehensive survey encompasses critical aspects such as material selection, fabrication intricacies, performance metrics including switching time and reliability, and the impact of these switches on diverse technological domains. The review critically analyzes the influence of design parameters, actuation mechanisms, and material properties on the performance of MEMS switches. Additionally, it explores recent advancements, breakthroughs, and innovative solutions proposed by researchers to address these challenges. The synthesis of the existing literature not only elucidates the current state of MEMS switch technology but also paves the way for future research avenues. The findings presented herein serve as a valuable resource for researchers, engineers, and technologists engaged in advancing MEMS switch technology, offering insights into the current landscape and guiding future endeavors in this rapidly evolving field.

show abstract

RF micro-electro-mechanical system (MEMS) capacitive switch performance parameters and improvement strategies

Cited by 4 publications

References 85 publications

Micro-Ring Resonator-Based Tunable Vortex Beam Emitter

Micro-Ring Resonator-Based Tunable Vortex Beam Emitter

Sub-0.3 volt amorphous metal WNx based NEMS switch with 8 trillion cycles

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Contact Info

Product

Resources

About