Fem Simulation of Piezoresistive Pressure Module

Abstract

Abstract. The impact of singularity points on stress distribution in piezoresistive module is investigated by means of FEM simulation. The strong influence of singularities on stress distribution in silicon-glass interface is presented in this paper. Àííîòàöèÿ. Èñïîëüçóÿ òåõíèêó êîíå÷íî-ýëåìåíòíîãî ìîäåëèðîâàíèÿ, èññëåäîâàíî âëè-ÿíèå ñèíãóëÿðíûõ òî÷åê íà ðàñïðåäåëåíèå íàïðÿaeåíèé â ïüåçîðåçèñòèâíîì ìîäóëå. Ïî-êàçàíî ñèëüíîå âëèÿíèå ñèíãóëÿðíîñòåé íà ðàñïðåäåëåíèå íàïðÿaeåíèé íà èíòåðôåéñå êðåìíèé-ñòåêëî.Êëþ÷åâûå ñëîâà: êîíå÷íî-ýëåìåíòíîå ìîäåëèðîâàíèå, ñåíñîð äàâëåíèÿ, ñèíãóëÿðíàÿ òî÷êà