2015
DOI: 10.1007/s11433-015-5720-5
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Femtosecond laser 3D fabrication of whispering-gallery-mode microcavities

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Cited by 10 publications
(3 citation statements)
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“…These patterns can be created or traced by controlling the laser beam focus point with galvanometric scanners or by moving the sample on a high-resolution XYZ stage with a fixed focal point . As the laser uses a wide range of wavelength to interact with the material, this versatility allows the user to add (polymerization), subtract (ablation), or modify different materials without harsh chemicals, preheating of the material, and the need for physical contact between the tools and material allowing the user to create true 3D structures. ,, The few advantages have generated interest in using DLW for the fabrication of many biomedical devices such as stents, prostheses, sensors, drug-delivery devices, and tissue-engineering scaffold. , …”
Section: D Lithographymentioning
confidence: 99%
“…These patterns can be created or traced by controlling the laser beam focus point with galvanometric scanners or by moving the sample on a high-resolution XYZ stage with a fixed focal point . As the laser uses a wide range of wavelength to interact with the material, this versatility allows the user to add (polymerization), subtract (ablation), or modify different materials without harsh chemicals, preheating of the material, and the need for physical contact between the tools and material allowing the user to create true 3D structures. ,, The few advantages have generated interest in using DLW for the fabrication of many biomedical devices such as stents, prostheses, sensors, drug-delivery devices, and tissue-engineering scaffold. , …”
Section: D Lithographymentioning
confidence: 99%
“…[8][9][10][11][12][13][14][15] Regardless of the attractive features of crystals, there is a strong desire to construct on-chip or three-dimensional (3D) devices to implement multifunctions in compact systems. [16][17][18][19] In photonics, such devices are based on structures of optical waveguides. The light propagation can be confined in waveguides in a diffraction-free way due to the total internal reflection, in which the optical intensity is able to reach a high level.…”
Section: Introductionmentioning
confidence: 99%
“…Previously, people used photolithograph, etching or hightemperature fusion to make the widely investigated microcavities including microdisks, microtoroids, microspheres, microrings and microbubbles, all of which can support high-Q whispering-gallery modes (WGMs). Recently, Xu et al [6] have summarized a newly developed fabrication technique of three-dimensional microcavities using femtosecond lasers. The femtosecond laser processing features with high fabrication resolution.…”
mentioning
confidence: 99%