Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH

Matsuo, Shigeki; Sumi, Hiroyuki; Kiyama, Satoshi; Tomita, Takuro; Hashimoto, Shuichi

doi:10.1016/j.apsusc.2009.04.065

Cited by 31 publications

(28 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The processing speed is usually does not start until some pre-shapes are textured on work surface. Therefore, the top surface is modified by laser energy (known as photo-modification process [89]) to enable the reaction initiation [90]. Pre-holes, in common, are generated to start chemical etching.…”

Section: Reduction Oxidation Reaction (Redox Reaction) Is the Fundamementioning

confidence: 99%

Laser Ablation and Laser-Hybrid Ablation Processes: A Review

Ahmed¹,

Darwish²,

Alahmari³

2015

Materials and Manufacturing Processes

101

View full text Add to dashboard Cite

Laser beam machining (LBM) has proven its applications and advantages over almost all the range of engineering materials. It offers its competences from macro machining to micro and nano-machining of simple-to-complex shapes. The hybrid approaches in laser ablation have demonstrated much improved results in terms of material removal rate, surface integrity, geometrical tolerances, thermal damage, metallurgical alterations and many more. The flipside of LBM is the existence of universal problems associated with its thermal ablation mechanism. In order to alleviate or reduce the inherent problems of LBM, a massive research has been done during the past decade in order to build a relatively new route of laser-hybrid processes. This paper reviews the research work carried out so far in the area of LBM and its hybrid processes for different materials and shapes. The article also highlights the research gaps and future research directions in the context of laser and laser-hybrid ablation.

show abstract

Section: Reduction Oxidation Reaction (Redox Reaction) Is the Fundamementioning

confidence: 99%

Laser Ablation and Laser-Hybrid Ablation Processes: A Review

Ahmed¹,

Darwish²,

Alahmari³

2015

Materials and Manufacturing Processes

101

View full text Add to dashboard Cite

show abstract

“…But in general, the 3D pattern's pitch and aspect ratio is mainly controlled by etching concentration and processing time. Matsuo et al [132] fabricated various kinds of micro-channels in Pyrex glass under femtosecond laser assisted etching with the use of aqueous solution of 10 mol/dm 3 KOH. They experienced the etching at elevated temperature (80°C) instead of room [133] temperature.…”

Section: D Structuresmentioning

confidence: 99%

“…The etching typically does not start until some pre-shapes are textured on the work surface. Therefore, the top surface is modified by the laser energy (known as photo-modification process [132]) to enable the reaction initiation [133]. Pre-holes, in common, are generated to start chemical etching.…”

Section: Parametric Effects and Inspirations Of Lcm/ementioning

confidence: 99%

Laser Beam Machining, Laser Beam Hybrid Machining, and Micro-channels Applications and Fabrication Techniques

Darwish

Ahmed

Al‐Ahmari

2016

Advanced Structured Materials

View full text Add to dashboard Cite

Laser beam machining (LBM) has proven its applications and advantages over almost all the range of engineering materials. It offers its competences from macro machining to micro and nano-machining of simple-to-complex shapes. The flipside of LBM is the existence of universal problems associated with its thermal ablation mechanism. In order to alleviate or reduce the inherent problems of LBM, a massive research has been done during the past decade and in turn build a relatively new route of laser-hybrid processes. The hybrid approaches in laser ablation have demonstrated much improved results in terms of material removal rate, surface integrity, geometrical tolerances, thermal damage, metallurgical alterations and many more. This chapter reviews the research work carried out so far in the area of LBM and its hybrid processes for different materials and shapes.

show abstract

“…Therefore, the top surface is modified by the laser energy (known as photo-modification process [132]) to enable the reaction initiation [133]. Laser ablation assisted with chemical etching is a promising technique to achieve such porous structures in a wide variety of materials.…”

Section: Parametric Effects and Inspirations Of Lcm/ementioning

confidence: 99%

“…28) with high aspect ratio (*10) on quartz glass by femtosecond laser inner modification. Matsuo et al [132] fabricated various kinds of micro-channels in Pyrex glass under femtosecond laser assisted etching with the use of aqueous solution of 10 mol/dm 3 KOH. In another study they achieved a 3D piled-octahedron structure by 5 wt% HF using a very low power laser (100 mW) with high repetition rate (100 kHz).…”

Section: D Structuresmentioning

confidence: 99%