Femtosecond-laser-based fabrication of metal/PDMS composite microstructures for mechanical force sensing

Nakajima, Yasuyuki; Obata, Kotaro; Machida, Manan; Hohnholz, Arndt; Koch, Jürgen; Suttmann, Oliver; Terakawa, Mitsuhiro

doi:10.1364/ome.7.004203

Cited by 20 publications

(10 citation statements)

References 36 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Lenses could be fabricated directly on-chip to improve collection efficiency of fluorescence emission. Silver gratings [33] as well as electronically conductive materials [34] have been inscribed in PEGDA hydrogels using femtosecond lasers and shows the potential of combining these materials to functional metallic nanomaterials for plasmonic, diffractive or electronic sensing. Integrating such metallic structures to the device could enhance the intensity of the fluorescence emission via plasmonic interaction [35], thus, could further improve the signal to noise ratio, limit of detection and sensitivity, which are critical properties of wearable microfluidic devices.…”

Section: Discussionmentioning

confidence: 99%

Fabrication of a Monolithic Lab-on-a-Chip Platform with Integrated Hydrogel Waveguides for Chemical Sensing

Torres-Mapa

Singh

Simon

et al. 2019

Sensors

Self Cite

View full text Add to dashboard Cite

Hydrogel waveguides have found increased use for variety of applications where biocompatibility and flexibility are important. In this work, we demonstrate the use of polyethylene glycol diacrylate (PEGDA) waveguides to realize a monolithic lab-on-a-chip device. We performed a comprehensive study on the swelling and optical properties for different chain lengths and concentrations in order to realize an integrated biocompatible waveguide in a microfluidic device for chemical sensing. Waveguiding properties of PEGDA hydrogel were used to guide excitation light into a microfluidic channel to measure the fluorescence emission profile of rhodamine 6G as well as collect the fluorescence signal from the same device. Overall, this work shows the potential of hydrogel waveguides to facilitate delivery and collection of optical signals for potential use in wearable and implantable lab-on-a-chip devices.

show abstract

Section: Discussionmentioning

confidence: 99%

Fabrication of a Monolithic Lab-on-a-Chip Platform with Integrated Hydrogel Waveguides for Chemical Sensing

Torres-Mapa

Singh

Simon

et al. 2019

Sensors

Self Cite

View full text Add to dashboard Cite

show abstract

“…Two groups have fabricated sensors using MDLW: gas sensors are demonstrated by Lee et al [52] and mechanical force sensors are demonstrated by Nakajima et al [53] (Figure 5).…”

Section: Sensorsmentioning

confidence: 99%

“…Nakajima et al on the other hand applied MDLW for the fabrication of a mechanical force sensor based on a PDMS-silver-composite structure (Figure 5b) [53]. To this end, they mix photocurable PDMS with silver benzoate in hexane and use a 522 nm wavelength femtosecond laser together with an NA = 0.4 objective for structuring.…”

Section: Sensorsmentioning

confidence: 99%

Functional Metallic Microcomponents via Liquid-Phase Multiphoton Direct Laser Writing: A Review

et al. 2019

View full text Add to dashboard Cite

We present an overview of functional metallic microstructures fabricated via direct laser writing out of the liquid phase. Metallic microstructures often are key components in diverse applications such as, e.g., microelectromechanical systems (MEMS). Since the metallic component’s functionality mostly depends on other components, a technology that enables on-chip fabrication of these metal structures is highly desirable. Direct laser writing via multiphoton absorption is such a fabrication method. In the past, it has mostly been used to fabricate multidimensional polymeric structures. However, during the last few years different groups have put effort into the development of novel photosensitive materials that enable fabrication of metallic—especially gold and silver—microstructures. The results of these efforts are summarized in this review and show that direct laser fabrication of metallic microstructures has reached the level of applicability.

show abstract

“…2 In addition, UV lasers, green subnanosecond lasers, femtosecond lasers, and other devices have been recently used as light sources that make possible high-quality precision micromachining. [3][4][5] The author took a slightly different approach, and reported on fabrication of micro-swelling structures on silicone rubber using vacuum UV lasers. 6,7 Specifically, main chain (Si-O bonds) on silicone rubber surface were photodecomposed using ArF excimer laser with the wavelength of 193 nm, and periodic micro-swelling structures are formed in course of depolymerization.…”

Section: Introductionmentioning

confidence: 99%

Periodic cylindrical structure of micro‐swelling silicone rubber fabricated by ArF excimer laser

Okoshi

2021

Elect Comm in Japan

View full text Add to dashboard Cite

Cylindrical structure of micro-swelling silicone rubber of approximately 1 µm diameter and 1.5 to 2 µm height was fabricated by the 193-nm ArF excimer laserinduced photodissociation of Si-O bonds of silicone rubber. To be periodically, single layer of silica glass microspheres was aligned on aluminum-coated silicone rubber during laser irradiation. The silicone rubber underneath each microsphere photochemically swelled, after laser-ablating aluminum to limit a diameter of the swelling. The aluminum also adjusted a focal point to the surface of silicone rubber to form a hole approximately 0.5 µm diameter centered at each the swelled silicone rubber. A purging O 2 molecules in the laser beam path by N 2 gas and lowering the laser pulse repetition rate were effective for fabricating the regular cylindrical structure. The regular cylindrical structure of micro-swelling silicone rubber showed superhydrophobicity.

show abstract

Femtosecond-laser-based fabrication of metal/PDMS composite microstructures for mechanical force sensing

Cited by 20 publications

References 36 publications

Fabrication of a Monolithic Lab-on-a-Chip Platform with Integrated Hydrogel Waveguides for Chemical Sensing

Fabrication of a Monolithic Lab-on-a-Chip Platform with Integrated Hydrogel Waveguides for Chemical Sensing

Functional Metallic Microcomponents via Liquid-Phase Multiphoton Direct Laser Writing: A Review

Periodic cylindrical structure of micro‐swelling silicone rubber fabricated by ArF excimer laser

Contact Info

Product

Resources

About