Femtosecond-laser fabrication of micron and sub-micron sized S-shaped constrictions on high T c superconducting YBa2Cu3O7−x thin films: ablation and lithography issues

Umenne, Patrice

doi:10.1007/s10854-016-6253-z

Cited by 10 publications

(8 citation statements)

References 22 publications

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“…After stacking, the laser energy irradiated on the periphery of the stacked area is sufficient to realize the partial vaporization of the Ag films. Therefore, the Ag film at the periphery of the stacked area will be partially removed via partial vaporization, and the unstacked area and the rest part of the stacked area are remained as residues [23]. The above-mentioned color change of the Ag films should be attributed to the oxidation of the Ag films that was originated from the intense heat effects of laser pulses.…”

Section: Resultsmentioning

confidence: 99%

Selective laser ablation and patterning on Ag thin films with width and depth control

Huang

Zhang

et al. 2020

J Mater Sci: Mater Electron

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Silver (Ag) films were deposited on glass substrates by radio frequency (RF) magnetron sputtering and then ablated by a 532 nm nanosecond pulsed laser. The effects of laser fluence and defocusing amount on the width and depth of laser-ablated grooves on 100-and 600-nm-thick Ag films were systematically investigated under single-and multi-scan ablation. The results suggested that the Ag films could be successfully removed from the substrate owing to laser-induced thermoelastic force or vaporization. It was confirmed that laser fluence and defocusing amount played very important roles in controlling the width and depth of the laser-ablated grooves. In the present work, grooves with widths ranging from 53 to 196 μm and depths ranging from 56 to 196 nm were obtained on 100-nm-thick Ag films by single-scan laser ablation, and laser ablation or removal with controllable depths was realized on 600-nm-thick Ag films by adopting single-or multi-scan (i.e., scanning numbers of 1-6). Furthermore, square spiral Ag patterns were successfully obtained by single-and multi-scan laser ablation and showed good electrical conductivity in a simple circuit. This work may have great potential applications in various fields that demand width and depth control of laser ablation/removal.

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Section: Resultsmentioning

confidence: 99%

Selective laser ablation and patterning on Ag thin films with width and depth control

Huang

Zhang

et al. 2020

J Mater Sci: Mater Electron

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“…2. The constrictions are cut in the shape of the letter "S" because it is easier to regulate both the length and the width of the bridge [10]. The length can be regulated by increasing or reducing the overlapping of the laser ablation spots (laser ablation width) and the width by bringing the ablation spots closer or further apart along the length of the sample.…”

Section: B Femtosecond Lasermentioning

confidence: 99%

“…(2) [10] where is the separation distance set between the laser ablation spots along the length of the sample in order to determine the width of the bridge. The laser ablation spot size can be determined with an AFM after cutting.…”

Section: B Femtosecond Lasermentioning

confidence: 99%

“…Thus, in practice, the sample is still exposed to the laser for a much longer period than femtoseconds and thermal degradation still occurs. The constrictions made were cut in the shape of the letter "S" because it is easier to regulate both the length and the width of the constriction [10] using this technique. The length can be decreased by decreasing the overlapping of the laser ablation spots and the width by bringing the ablation spots closer together.…”

Section: Introductionmentioning

confidence: 99%

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Micron-Sized Constrictions Fabricated Using the Femtosecond Laser Technique on YBCO Thin Films

Umenne

2019

J Supercond Nov Magn

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In this paper, I report on the fabrication of micron-sized constrictions in YBCO thin films using the femtosecond laser technique.The constrictions are S-shaped superconducting weak links fabricated on YBCO thin films. The constrictions show a measurable superconducting current flowing through them. Current -Voltage (I-V) characteristics were used to determine the critical current of the constrictions at 77 K. The width of the constrictions was determined at the narrowest point using SEM (Scanning electron microscope). Three micron-sized constrictions were fabricated with a width of 2.88 µm, 1.72 µm, 1.69 µm and a length of 5 µm.Based on the width and length of these constrictions in relation to the coherence length ( ) of the YBCO these constrictions should conduct supercurrent by Abrikosov vortices. The SEM images show that the femtosecond laser heats the samples beyond the geometric boundary, damaging some of the superconductive phase of the YBCO constrictions. As a result, the constrictions conduct current by one-dimensional depairing.

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“…(1) The fabricated constrictions where S-shaped. With such shape it is possible to regulate both the width and the length of the constriction, as described elsewhere [8]. The width is controlled by bringing the laser ablation spots closer along the length of the thin film sample, while the length can be controlled by separating the laser ablation spots along the width of the thin film sample.…”

Section: Laser Specifications and Settingsmentioning

confidence: 99%

Constrictions Fabricated on YBCO Thin Film using the Femtosecond Laser: Limiting Factors

Umenne

2018

Acta Phys. Pol. A

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In this paper we report on the development of a new application of the femtosecond laser, namely, the fabrication of micron, sub-micron and nano sized constrictions on YBCO superconductive thin films. The fabricated micron, sub-micron and nano constrictions have widths of 1.09 µm, 705 nm and 394.8 nm, respectively. The thickness of these constrictions ranged from about 160 nm to 190 nm, as defined by the depth profile on the 3D AFM images. The length of these constrictions ranged from 7.2 µm to 7.5 µm. The length of these constrictions depends on the size of the laser ablation spot used for cutting and on the separation distance between the laser ablation spots along the width of the sample.

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Femtosecond-laser fabrication of micron and sub-micron sized S-shaped constrictions on high T c superconducting YBa2Cu3O7−x thin films: ablation and lithography issues

Cited by 10 publications

References 22 publications

Selective laser ablation and patterning on Ag thin films with width and depth control

Selective laser ablation and patterning on Ag thin films with width and depth control

Micron-Sized Constrictions Fabricated Using the Femtosecond Laser Technique on YBCO Thin Films

Constrictions Fabricated on YBCO Thin Film using the Femtosecond Laser: Limiting Factors

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