Femtosecond Laser Microfabricated Optofluidic Mach–Zehnder Interferometer for Refractive Index Sensing

Zhang, Daiying; Men, Liqiu; Chen, Qiying

doi:10.1109/jqe.2018.2871315

Cited by 6 publications

(3 citation statements)

References 28 publications

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“…6(c), the MZI of longer sensing length shows more interference stripes in the spectrum. The reason may be that the longer sensing length leads to larger phase differences resulting in shorter interference periods [30]. The simulation work results show good agreement with the relationship between the phase difference and the sensing length of the MZI, as shown in equation (2).…”

Section: The Simulation Resultssupporting

confidence: 73%

Refractive Index Sensing Performances of a Mid-Infrared Asymmetric Mzi Based on Suspended Gaas Waveguides

Wang¹,

Ma²,

Ma³

et al. 2022

PIER M

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A novel mid-infrared (MIR) biochemistry sensor using two suspended GaAs waveguides based on an asymmetric Mach-Zender Interferometer (MZI) is proposed. The propagation properties and refractive index (RI) sensing performances of MZI are investigated by the finite element method (FEM). The simulation results show that the maximum waveguide sensitivities (S wg ) of the TE and TM modes in the suspended GaAs waveguide are ∼ 1.2 and ∼ 1.0. This design of the GaAs waveguide using the suspension structure is to enhance the interaction between the vanishing field and measured material. The RI sensitivity of the asymmetric MZI structure increases with the length of the sensing arm, which can reach 854.5 nm/RIU with a Q of 208.2 after parameter optimization. The two arms of the MZI are designed as width-asymmetric structures to make the sensor more sensitive to the measured material. The asymmetric MZI sensing structure has high RI sensitivity and compact structure, which provides a feasible scheme for biochemical sensing.

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Section: The Simulation Resultssupporting

confidence: 73%

Refractive Index Sensing Performances of a Mid-Infrared Asymmetric Mzi Based on Suspended Gaas Waveguides

Wang¹,

Ma²,

Ma³

et al. 2022

PIER M

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“…This is the first time that femtosecond laser-induced two-photon polymerization (TPP) has been used to develop a polymer-based microcantilever in medical and environmental applications. There are many individual advantages of TPP technology, including its ability to be flexibly manufactured and its high machining accuracy, which make it widely used in micromachines, photonics, biomedicine, and microfluidics [ 60 , 61 , 62 , 63 ]. The fabrication process of the polymer-based microcantilever using TPP can be summarized in four steps.…”

Section: Fiber-top Microcantilever Sensormentioning

confidence: 99%

Optical Fiber Probe Microcantilever Sensor Based on Fabry–Perot Interferometer

Yong-zhang

Zheng

Xiao

et al. 2022

Sensors

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Optical fiber Fabry–Perot sensors have long been the focus of researchers in sensing applications because of their unique advantages, including highly effective, simple light path, low cost, compact size, and easy fabrication. Microcantilever-based devices have been extensively explored in chemical and biological fields while the interrogation methods are still a challenge. The optical fiber probe microcantilever sensor is constructed with a microcantilever beam on an optical fiber, which opens the door for highly sensitive, as well as convenient readout. In this review, we summarize a wide variety of optical fiber probe microcantilever sensors based on Fabry–Perot interferometer. The operation principle of the optical fiber probe microcantilever sensor is introduced. The fabrication methods, materials, and sensing applications of an optical fiber probe microcantilever sensor with different structures are discussed in detail. The performances of different kinds of fiber probe microcantilever sensors are compared. We also prospect the possible development direction of optical fiber microcantilever sensors.

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“…88,89 Additionally, a wide range of materials can be processed via this technology, including metals, polyester, semiconductors, glass, and so on. [90][91][92][93][94][95][96] This technology also shows great potential for creating sophisticated patterns on the material surface. [97][98][99][100][101] Consequently, femtosecond laser microfabrication technology has become an important tool for surface micro-nano manufacturing.…”

Section: Femtosecond Laser Microfabricationmentioning

confidence: 99%

Recent advances in femtosecond laser-structured Janus membranes with asymmetric surface wettability

Yin

et al. 2021

Nanoscale

136

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Femtosecond Laser Microfabricated Optofluidic Mach–Zehnder Interferometer for Refractive Index Sensing

Cited by 6 publications

References 28 publications

Refractive Index Sensing Performances of a Mid-Infrared Asymmetric Mzi Based on Suspended Gaas Waveguides

Refractive Index Sensing Performances of a Mid-Infrared Asymmetric Mzi Based on Suspended Gaas Waveguides

Optical Fiber Probe Microcantilever Sensor Based on Fabry–Perot Interferometer

Recent advances in femtosecond laser-structured Janus membranes with asymmetric surface wettability

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