Femtosecond laser micromachining of fused silica molds

Madani-Grasset, Frédéric; Bellouard, Yves

doi:10.1364/oe.18.021826

Cited by 27 publications

(18 citation statements)

References 41 publications

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“…In previous work, the fidelity of such structures after demolding was shown to be extremely high, with an average height difference of 1.6 nm between master and mold features [17]. This technique is thus feasible for fabrication on the nanoscale.…”

Section: Discussionmentioning

confidence: 86%

“…After the etching is complete, the samples were coated with a nanometers-thick monolayer of high-density PDMS to decrease the adhesion between the glass and the polymer. The process is described in detail in previous work [17]; in short, this monolayer was made with silanol-terminated PDMS macromolecules with an average molecular weight of 139 kg/mol (Gelest, Inc). It is prepared in an octane solvent at 50% v/v, deposited on the mold, allowed to evaporate, incubated, and the excess monomer rinsed off with toluene.…”

Section: Fabrication and Methodologymentioning

confidence: 99%

“…We have previously demonstrated the demolding of pillars and microchannels fabricated with femtosecond laser machining, particularly as a tool for studying the geometry and machining quality of the structures [17].…”

Section: Introductionmentioning

confidence: 99%

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Molding topologically-complex 3D polymer microstructures from femtosecond laser machined glass

Schaap¹,

Bellouard²

2013

Opt. Mater. Express

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Abstract:The fabrication of complex, three-dimensional microscale shapes that can be replicated over large surfaces is an ongoing challenge, albeit one with a wide range of possible applications such as engineered surfaces with tuned wetting properties, scaffolds for cell studies, or surfaces with tailored optical properties. In this work, we use a two-step femtosecond laser directwrite technique and wet-etching process to fabricate monolithic glass micromolds with complex three-dimensional surface topologies, and demonstrate the replication of these structures in a soft polymer (polydimethylsiloxane, PDMS). To estimate the forces experienced during the demolding for one representative structure, we use a combination of two models -a simple linear elastic model and a numerical hyperelastic model. These models are used to support the high experimental success rates of the demolding process observed, despite the high strain induced in the material during demolding. Since the process used is scalable, this work opens new avenues for low-cost fabrication of surfaces having complex microscale patterns with three-dimensional geometries.

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Section: Discussionmentioning

confidence: 86%

Section: Fabrication and Methodologymentioning

confidence: 99%

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Molding topologically-complex 3D polymer microstructures from femtosecond laser machined glass

Schaap¹,

Bellouard²

2013

Opt. Mater. Express

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“…Fused silica presents an interesting material for study, particularly due to its use in the fabrication of a wide variety of devices [2,4,6,32,36,37]. When fabricating these devices, laser-induced anisotropy can have adverse effects on production time, defects, and overall device reliability.…”

Section: Fused Silicamentioning

confidence: 99%

“…On the other hand, stress has also been shown to locally influence the etching rate of silica [32,33], potentially resulting in faster processing times. From these examples, it is clear that the process of laser fabrication would greatly benefit from more information about the stress state in a material.…”

Section: Introductionmentioning

confidence: 99%

Visualization of femtosecond laser-induced stress anisotropy in amorphous and crystalline materials

McMillen

Chen

Bellouard

2015

MATEC Web of Conferences

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Abstract. In recent years, micro manufacturing with femtosecond lasers has received considerable attention as an efficient technique for producing three-dimensional devices, combining multiple functionalities in a single monolithic substrate. In this manufacturing process, stress-anisotropy resulting from non-ablative laser exposure can have both positive and negative effects on the process out-come. In this work, we present a simple method for visualizing stress anisotropy, combining highly symmetric laser-written patterns with polarization microscopy, as a tool for identifying the various anisotropic contributions to the laser fabrication process.

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Glass‐Channel Molding Assisted 3D Printing of Metallic Microstructures Enabled by Femtosecond Laser Internal Processing and Microfluidic Electroless Plating

Zhong

et al. 2018

Adv Materials Technologies

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the trend of miniaturization, the 3D printing has become a power tool for producing various types of microstructures including photonics, microfluidics, micromechanics, and biostructures. [2][3][4][5][6] The most commonly used materials supporting 3D microprinting are based on polymer, as the polymer is easy to be processed. In the meantime, there is a high demand on the 3D metallic microstructures in applications such as microelectronics, terahertz photonics, microelectromechanical systems, and 3D electrodes, to name a few. [7][8][9][10] Generally speaking, the current additive manufacturing approach of 3D metal printing heavily relies on powder fusing methods such as laser selective melting and electron beam melting, [11] which is intrinsically a thermal process inevitably suffering from a thermal diffusion detrimental for high-resolution 3D printing. Therefore, several 3D metallic direct microprinting methods such as direct ink writing, [12] electrohydrodynamic printing, [13] local electrophoretic deposition, [14] laser induced forward transfer, [15] layer-by-layer electrodeposition, [16] laserinduced photoreduction, [17] and electrodeposition-based 3D printing [18] have been developed. Besides above-mentioned 3D 3D printing of metallic microstructures is highly desirable for many practical applications such as microelectronics, terahertz photonics, microelectromechanical systems, and electrochemisty. Unfortunately, high resolution microprinting of 3D metal structures with widely tunable feature sizes, high conductivities, high melting points, and highly smooth surfaces remains challenging for current microfabrication technologies. Herein, 3D printing of metallic microstructures of feature sizes ranging from ≈10 to ≈200 μm by combining femtosecond laser micromachining of 3D glass microchannels and microfluidic electroless plating is demonstrated. The proposed technique allows for producing 3D metallic structures of almost arbitrary geometries embedded in glass since the continuous flow of the plating solution enables controllable deposition of metal films inside the through microchannels. Moreover, freestanding metallic 3D microstructures are fabricated by removing the glass matrix with a wet chemical etching. As a nonthermal processing, the surface roughness of the fabricated metallic structures is as low as ≈20 nm. The 3D microstructures can be made of either silver or copper covered with a thin layer of silver, which are shown to have a high conductivity. As a proof-of-concept demonstration, a 3D metal scaffold structure with a size of ≈5 × 5 × 2 mm 3 is printed.

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Femtosecond laser micromachining of fused silica molds

Cited by 27 publications

References 41 publications

Molding topologically-complex 3D polymer microstructures from femtosecond laser machined glass

Molding topologically-complex 3D polymer microstructures from femtosecond laser machined glass

Visualization of femtosecond laser-induced stress anisotropy in amorphous and crystalline materials

Glass‐Channel Molding Assisted 3D Printing of Metallic Microstructures Enabled by Femtosecond Laser Internal Processing and Microfluidic Electroless Plating

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