Femtosecond Laser Micromachining of Soda–Lime Glass in Ambient Air and under Various Aqueous Solutions

Abstract

We have studied femtosecond ablation of soda–lime glass sample under thin water film, under KOH and NaCl aqueous solutions films and their influence and benefits compared with ablation in the air atmosphere. These have been studied in case of the groove ablation using the infrared (IR) femtosecond laser. KOH aqueous solution film above the glass sample improved the ablation efficiency and led to the formation of the grooves with a higher aspect ratio when multi-scan glass cutting conditions were applied.

A Review of Femtosecond Laser Processing of Silicon Carbide

“…X-ray photoelectron spectroscopy analysis indicates a reduced ratio of oxygen to metal species on the sample surface in an argon atmosphere, resulting in minimal oxidation [80]. In the case of glass samples subjected to femtosecond laser micromachining in various solutions (including NaCl and KOH aqueous solutions, water, and on the surface of the workpiece), the resulting groove depths and widths were evaluated [81]. At low scanning speeds (50 mm/s), the dissolution of NaCl in distilled water led to an increase in charge density and accelerated multiphoton ionization in the ablation region, resulting in deeper grooves.…”