“…51,52 It is noted that by NH 3 plasma etching on the FeP/NPCNT sample, the diffraction peaks of Fe 2 P became weaker and even almost vanished, whilst the diffraction peaks of FeP became stronger, implying the phase conversion of Fe 2 P to FeP nanoparticles with increased crystallinity, which have been proved as good ORR electrocatalyst. [42][43][44]48 However, immoderate plasma etching for 45 min could generate excess defects and severely damage both FeP nanoparticles and CNTs, resulting in the intensity shrinkage of their diffraction peaks. It can be observed that the characteristic peak positions of FeP in CV-FeP/NPCNT-t did not show an obvious shift as compared with FeP/NPCNT, indicating again that ammonia plasma etching did not cause detectable nitrogen element doping into iron phosphide.…”