2017
DOI: 10.1002/pssa.201700249
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Ferroelectric HfO2 thin film testing and whole wafer mapping with non‐contact corona‐Kelvin metrology

Abstract: We present results of a non‐contact, real‐time feedback corona‐Kelvin characterization of the ferroelectric properties of Si:HfO2 thin films. Measurements were performed on free dielectric surfaces. The method uses corona charging pulses coupled with Kelvin probe‐measured surface voltage and gives non‐contact QV and CV characteristics. Analogous to voltage biasing of metal‐insulator‐metal (MIM) capacitors, large corona charge biasing is found to provide an effective means for poling of the ferroelectric films.… Show more

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