Ferromagnetic micromechanical magnetometer

Yang, H. H.; Myung, Nosang V.; Yee, Jeffrey; Park, D.-Y.; Yoo, Bongyoung; Schwartz, M.; Nobe, Ken; Judy, Jack W.

doi:10.1016/s0924-4247(01)00809-3

Cited by 83 publications

(42 citation statements)

References 9 publications

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“…Polarization resistances and pitting potentials were determined from EIS and LSV, respectively. both in-plane and out-of-plane coercivities must be considered for magnetic-MEMS device, since they can be actuated in both in-plane and out-of-plane direction [8,9]. Both coercivities were gradually decreased with increasing Ni content, however abrupt changes occurred when Ni content was varied from ∼3 at.% to ∼13 at.%.…”

Section: Resultsmentioning

confidence: 99%

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Electrodeposition of FeCoNi thin films for magnetic-MEMS devices

Yoo

Hernández

Park

et al. 2006

Electrochimica Acta

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Section: Resultsmentioning

confidence: 99%

“…A higher magnetic moment is especially important for magnetic-MEMS actuators, which create mechanical movement by interaction between magnetic materials and external magnetic field, to obtain relatively large forces [8,9]. In addition, film stress of magnetic materials must be minimized to prevent structural failure.…”

Section: Introductionmentioning

confidence: 99%

Electrodeposition of FeCoNi thin films for magnetic-MEMS devices

Yoo

Hernández

Park

et al. 2006

Electrochimica Acta

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“…(Reproduced from [73] by permission of The Electrochemical Society.) micromechanical magnetometers using soft materials [79] and flux gate magnetic sensors [59]. An interesting application of Permalloy electroplating consists in the fabrication of magnetic micromotors utilizing soft magnetic materials for the stator and the rotor.…”

Section: Electrodeposition Of Magnetic Materials For Memsmentioning

confidence: 99%

Microelectromechanical Systems

Zangari

2010

Modern Electroplating

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“…The torque experienced by the magnet as shown by (1) is proportional to the magnetic volume and thus has a cubic dependence on the scale of the linear dimension. However, the opposing mechanical torque also scales cubically and can be expressed as (4) with half the beam width , half the beam thickness , beam length , and shear modulus . is a shape-dependent factor that scales as .…”

Section: A Scaling Propertiesmentioning

confidence: 99%

Optically-Interrogated Zero-Power MEMS Magnetometer

Vasquez

Judy

2007

J. Microelectromech. Syst.

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A magnetic-field-sensing system that consists of a miniature zero-power magnetometer, an integrated micromachined corner-cube reflector (CCR), a commercially available diode laser, and a photodetector array, has been designed, fabricated, assembled, and tested. The zero-power-magnetometer design is based on a ferromagnetic MEMS magnetometer, which consists of a permanent magnet that is torsionally suspended to allow rotation about a single axis. A single mirror of the CCR is attached to the magnetometer torsion beam. When the magnet rotates in response to a change in magnetic field, the torsion beam will twist and cause the mirror to become misaligned. The non-ideality of the CCR can be interrogated with a laser and a photosensor array can be used to measure the reflected signal. This method of magnetic sensing completely eliminates sensor-node power consumed at the remote location. The sensor node developed for this paper occupies a volume of only 1.5 mm 3 and can detect a magnetic field between 820 A/m to 6 kA/m with an uncertainty of 90 A/m at a 1-m optical-interrogation range. The primary application of this technology is in wireless sensing systems that must operate continuously without providing or maintaining the sensor-node energy (e.g., replacing batteries or scavenging energy) or in extremely harsh environments where power supplies and integrated circuits (IC) are not an option.[1616]

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Ferromagnetic micromechanical magnetometer

Cited by 83 publications

References 9 publications

Electrodeposition of FeCoNi thin films for magnetic-MEMS devices

Electrodeposition of FeCoNi thin films for magnetic-MEMS devices

Microelectromechanical Systems

Optically-Interrogated Zero-Power MEMS Magnetometer

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