In this work, Bragg gratings were used to monitor, in real time, the temperature during the diamond deposition process obtained by hot filament chemical vapor deposition (HFCVD). Due to the instability of uniform fiber Bragg gratings (FBGs) to high temperatures, regenerated fiber Bragg gratings (RFBGs) were utilized. The results reveal that the diamond deposition process occurs at about 832 ºC (in the experimental conditions used in this case). The work also suggests that RFBGs are suitable devices to monitor processes which, as in the diamond deposition, the temperature is a critical parameter, and where other traditional methods have a little feasibility due to the own experimental setup or samples type under study.