Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring

Hsu, Hsiang-Chang; Hsieh, Tso-Sheng; Chen, Yi-Chian; Chen, Hung-En; Tsai, Liren; Chiang, Chia‐Chin

doi:10.3390/ma10111297

Cited by 6 publications

(2 citation statements)

References 16 publications

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“…Actuators based on optical fibre have been well reported in the literature while the scope of fibre optic-based selfsensing has limited [24][25][26][27][28][29][30][31]. Here, a fibre optic sensor was developed in-house using the tailor-made thermal evaporation technique, where the optical fibre was kept rotating with the help of motor drive and the copper-based alloy fine mesh target materials kept in the vibrating chamber were deposited using the evacuated high vacuum pressure at 10 −5 mbar with the current of 10 A for a period of desired time to obtain an optimum level thickness [32,33].…”

Section: Introductionmentioning

confidence: 99%

Design and development of Cu‐Al‐Mn‐Ni shape memory alloy coated optical fibre sensor for condition‐based monitoring of physical systems

Subramaniam

Singh

Raikwar

et al. 2021

IET Collab Intel Manufact

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Online fault detection, isolation and recovery using smart sensors play an important role in intelligent manufacturing system. Fibre optic sensors are very interesting for condition monitoring applications due to the advantage of this technology. Here, the experimental demonstration of Cu-based shape memory alloy (SMA) coated optical fibre for temperature-based sensing applications is reported. The benefit of Cu-based SMA coated optical fibre over conventional metallic coating has been evaluated in the study. For consistent coating, an in situ fixture with a rotary drive setup has been designed and developed. Thermo optic test bench has been developed to study the actuation characteristics of the SMA coated optical fibre for varying current and voltage. Experiments were performed to investigate the light intensity in the SMA coated optical fibre at different actuation conditions. The displacement that takes place in the optical fibre due to the external temperature stimuli will create proportional intensity and wavelength shifts. The maximum average displacement of 4.9 mm has been achieved for Cu-Al-Mn-Ni coated optical fibre. Results show variation in the optical fibre signal due to heating and cooling of the fibre from the applied electrical stimulus on Cu-based SMA coating in the form of austenite to martensite transformation.This is an open access article under the terms of the Creative Commons Attribution-NonCommercial-NoDerivs License, which permits use and distribution in any medium, provided the original work is properly cited, the use is non-commercial and no modifications or adaptations are made.

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Section: Introductionmentioning

confidence: 99%

Design and development of Cu‐Al‐Mn‐Ni shape memory alloy coated optical fibre sensor for condition‐based monitoring of physical systems

Subramaniam

Singh

Raikwar

et al. 2021

IET Collab Intel Manufact

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“…The CO 2 scanning method is a cost-effective way to inscribe LPFGs compared with other fabrication approaches such as femtosecond laser irradiation (19)(20)(21) and wet or dry etching processes. (22)(23)(24) For orthogonal input polarization states (IPSs), the transmission spectrum of the fabricated PMPC-LPFG has different ADs, designated as AD 1 and AD 2, with dissimilar cladding-mode orders owing to the PMPCF birefringence. Regardless of the IPS, we can obtain both AD 1 and AD 2 by employing the FRM and connecting it to one end of the PMPC-LPFG.…”

Section: Introductionmentioning

confidence: 99%

Polarization-insensitive Simultaneous Measurement of Torsion and Temperature Using Long-period Fiber Grating Written on Polarization-maintaining Photonic Crystal Fiber

Kim¹,

Han²,

Lee³

2021

Sensors and Materials

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Here, we report a novel optical fiber grating sensor capable of simultaneous measurement of torsion and temperature by utilizing a long-period fiber grating (LPFG) written on a polarization-maintaining photonic crystal fiber (PMPCF) and a Faraday rotator mirror (FRM) concatenated in series with the LPFG. The LPFG written on the PMPCF, referred to as a PMPC-LPFG, which is connected in series with the FRM, exhibits a polarization-independent wavelength-dependent loss spectrum in its reflection spectrum, which has two attenuation dips (ADs) designated as AD 1 and AD 2. When these two ADs have different cladding-mode orders, they have different torsion responses as well as temperature responses. For the two ADs with resonance wavelengths of λ 1 = ~1508.02 nm and λ 2 = ~1533.48 nm, torsion and temperature responses were investigated in a twist angle range from −70 to 70° (step: 10°) and an ambient temperature range from 25 to 95 °C (step: 10 °C), respectively. The torsion sensitivities of AD 1 and AD 2 were measured as ~157.0 and ~272.7 pm/rad at room temperature, and their temperature sensitivities were measured as ~5.8 and ~8.2 pm/°C, respectively. Owing to their linear and independent responses to torsion and temperature, torsion and temperature changes applied to the PMPC-LPFG can be simultaneously evaluated from the measured wavelength shifts of AD 1 and AD 2 using their predetermined torsion and temperature sensitivities.

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An inspired nanoscale system to evaluate interfacial behavior of layered structures

Chen

Peng

et al. 2020

Computational Materials Science

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Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring

Cited by 6 publications

References 16 publications

Design and development of Cu‐Al‐Mn‐Ni shape memory alloy coated optical fibre sensor for condition‐based monitoring of physical systems

Design and development of Cu‐Al‐Mn‐Ni shape memory alloy coated optical fibre sensor for condition‐based monitoring of physical systems

Polarization-insensitive Simultaneous Measurement of Torsion and Temperature Using Long-period Fiber Grating Written on Polarization-maintaining Photonic Crystal Fiber

An inspired nanoscale system to evaluate interfacial behavior of layered structures

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