2009
DOI: 10.1109/jmems.2009.2031675
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Field-Concentrator-Based Resonant Magnetic Sensor With Integrated Planar Coils

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Cited by 26 publications
(8 citation statements)
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“…It could increase the electrical response of the magnetic field sensor to detect weak magnetic fields. These planar coils could be fabricated on the same silicon wafer using a physical vapor deposition (PVD) of aluminum [32] , [49] . Each coil could generate a magnetic noise using electrical current pulses with different amplitudes (about 100 mA) and random frequencies.…”
Section: Discussionmentioning
confidence: 99%
“…It could increase the electrical response of the magnetic field sensor to detect weak magnetic fields. These planar coils could be fabricated on the same silicon wafer using a physical vapor deposition (PVD) of aluminum [32] , [49] . Each coil could generate a magnetic noise using electrical current pulses with different amplitudes (about 100 mA) and random frequencies.…”
Section: Discussionmentioning
confidence: 99%
“…18 µm thick commercially available Metglas ® 2714A ribbons were successively laminated to form the magnetic core. Metglas ® 2714A was chosen as the core material for its high permeability, low energy dissipation and high resistivity [49], [50]. Metglas ® is available as a magnetically anisotropic material, makes it appropriate choice for high frequency applications.…”
Section: Magnetic Materials For Power Conversion Applicationsmentioning
confidence: 99%
“…6 Hz T À1 and the resolution is 217 nT however the output of the device is affected by temperature shifts. In [23] a sensor with sensitivity 1.0 MHz T À1 , resolution 400 nT, and quality factor around 2400 is demonstrated. This is another example of a magnetic field sensor which exploits the shift of the first resonant frequency of the resonator for the detection of the external magnetic field.…”
Section: Introductionmentioning
confidence: 99%