Field emission studies of diamond-like films grown by RFCVD

Lue, Juh Tzeng; Chen, Sheng-Yuan; Chen, Chi‐Ling; Lin, Mei-Chung

doi:10.1016/s0022-3093(00)00006-5

Cited by 18 publications

(5 citation statements)

References 19 publications

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“…The curves illustrate that the emission currents are insensitive but detectable to be dependent on temperatures. This behaviour is quite different from the temperature dependence of the FE characteristic of diamond films or diamond-like (DLC) films [30][31][32], because structure and strong field emission on the sharp tip of CNTs is different from that of a flat emitter. It is suggested that the dominant contribution to field emission comes from the semiconducting amorphous carbon at the sharp tip of CNTs, which have a high aspect ratio.…”

Section: Resultsmentioning

confidence: 77%

Fabrication and field emission property studies of multiwall carbon nanotubes

Chen

Miao

Lue

et al. 2003

J. Phys. D: Appl. Phys.

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Well-aligned and randomly grown multiwall nanotubes (MWNTs) fabricated by the radio-field-induced self-bias hot-filament chemical vapour deposition method demonstrate that the growth mechanisms are either 'tip growth' or 'base growth' depending on the size of the catalyst metal particles involved. The carbon nanotubes (CNTs) can also be successfully grown on iron-like bulk alloys when preceded by hydrogen plasma etching. The high yield of CNT fabricated on oxidized metal alloys is attributed to the high active surface area that ensues from etching. The change in field emission currents of MWNTs with temperature is not sensitive but is detectable within the range 300-20 K. This is interpreted to be due to the high aspect ratio of CNTs.

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Section: Resultsmentioning

confidence: 77%

Fabrication and field emission property studies of multiwall carbon nanotubes

Chen

Miao

Lue

et al. 2003

J. Phys. D: Appl. Phys.

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“…The surface morphology of the film indicated that the film surface is not flat and the roughness is about 0.8 μm on average. The emission is more likely to be a significant particular sites rather than over the entire surface (4), (8) . There seems to be the enhancement factor such as the surface roughness on the film with respect to the emission phenomenon.…”

Section: Resultsmentioning

confidence: 99%

“…Diamond like carbon (DLC) films are generally prepared from the various gas phase methods, such as ion-beam sputtering, laser ablation deposition and chemical vapor deposition techniques (1)- (8) .…”

Section: Introductionmentioning

confidence: 99%

Deposition of Nitrogen Doped Carbon Film by Electrolysis of Methanol-Ammonia Solution

et al. 2003

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Nitrogen doped carbon film has been grown on silicon substrate at temperature of 60 degrees in the methanol-ammonia solution. The substrate was negatively biased with a dc potential less than 100 V for current density of 4 mA/cm 2 as constant-current electrolysis. The work function and the resistivity of the film decreased remarkably. From the results of Raman spectra and X-ray photoelectron spectroscopy, it was also confirmed that the film is amorphous containing only small amounts of diamond component, and nitrogen atoms are doped in the film though containing some organic residue.

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“…The field emission was measured under a vacuum of 10 −6 torr with a Teflon spacer of 150 m and a Mo (thickness of 3 m) coated glass plate displaying as the anode. 16 The field emission properties do not follow the Fowler-Nordheim equation but comply with the metal-semiconductor tunneling theory. 17 18 The circuit for performing the micro-EDM is shown in Figure 2 where the integrated circuit SG3524 produces the controlling square clocks which are amplified by the high voltage transistor IRF640 to control the switching voltage for embarking the discharge electrodes D6 to start or close.…”

Section: Methodsmentioning

confidence: 95%

Surface Modification by Electric Discharge Implemented with Electrodes Composed of Carbon Nanotubes

Miao

Jt²,

Ms³

2006

J. Nanosci. Nanotech.

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In this work the electric discharge machining (EDM) implementing with multi-wall carbon nanotubes (MWCNT) as a miniscule electrode for pursuing precise surface modification was studied. The excellent upright growth of carbon nanotubes on copper based alloy substrates by a radio frequency (RF) assisted hot filament chemical vapor deposition (HFCVD) method suggests us to exploit MWCNTs as the miniature electrodes for discharge machining. The results reveal that the electrodes are much endurable to be distorted even when the spoiling rates for the polishing of n-type Si wafer (of 10 to approximately 100 omega-cm) are up to 30 nm/min with. It is expected that MWCNTs can be applied to non-conventional material processing especially in miniature discharge machining.

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Field emission studies of diamond-like films grown by RFCVD

Cited by 18 publications

References 19 publications

Fabrication and field emission property studies of multiwall carbon nanotubes

Fabrication and field emission property studies of multiwall carbon nanotubes

Deposition of Nitrogen Doped Carbon Film by Electrolysis of Methanol-Ammonia Solution

Surface Modification by Electric Discharge Implemented with Electrodes Composed of Carbon Nanotubes

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