The analytical method for ultra-trace metal impurities at μg kg -1 level in high-purity Cd was examined by inductively coupled plasma mass spectrometry (ICP-MS) combined with matrix separation by Bio-Rad AG MP-1M anion exchange resin. After the separation of Cd, the metal impurities such as Li, In, Cr, Mn, Fe, Co, Ni, Cu, Ga, Sr, Ba and Pb were measured by an ICP-quadrupole mass spectrometer (ICP-QMS) and ICP-sector field mass spectrometer (ICP-SFMS). From the comparison of measured results, it was evaluated that the analytical sensitivity by ICP-SFMS was 10 times higher than ICP-QMS. In addition, ICP-SFMS could obtain determined values of Li and Fe that could not be determined by ICP-QMS. These results suggest the ICP-SFMS combined with matrix separation by anion exchange resin could be utilized for the determination of ultra-trace metal impurities in high-purity materials for the assessment of the purity of the materials.