Fine pointing control for optical communications

Portillo, Angel; Ortiz, G.G.; Racho, C.

doi:10.1109/aero.2001.931385

Cited by 25 publications

(15 citation statements)

References 4 publications

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“…The problem of steering a light beam to hit a target using mirrors is not new. There are many applications for continuous visible light, generated from HeNe lasers for example [2]. There are even implementations of beam steering for pulsed light sources [3].…”

Section: Problem Definitionmentioning

confidence: 99%

“…The beam leaving the light source must be projected many meters (2)(3)(4)(5)(6)(7)(8)(9)(10)(11)(12)(13)(14)(15)(16)(17)(18)(19)(20) and reflected off many turning mirrors as it travels from the light source to the scanner. The jitter in the beam exiting the laser for a typical light source operating in spec is on average 100um in position and 100urad in angle.…”

Section: Problem Definitionmentioning

confidence: 99%

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High-performance beam stabilization for next-generation ArF scanner systems

Lublin¹,

Warkentin²,

Das³

et al. 2003

SPIE Proceedings

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With the advent of 193 nm systems processing 300 mm wafers, the production lithography cell is about to undergo a technology shift. The mechanism for delivering the beam from the light source to the illumination system, here referred to as a Beam Delivery Unit (BDU), must change to meet the challenges imposed by this shift. To support these changes, Cymer is developing a BDU that will guarantee a stable beam at the scanner entrance during exposure. The beam stabilization control system has been implemented in a test BDU. We shall present results from experiments that demonstrate our ability to significantly improve short and long term "Beam Stability".

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Section: Problem Definitionmentioning

confidence: 99%

Section: Problem Definitionmentioning

confidence: 99%

High-performance beam stabilization for next-generation ArF scanner systems

Lublin¹,

Warkentin²,

Das³

et al. 2003

SPIE Proceedings

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show abstract

“…The first FSM in the system, element (4) is used as the point-ahead mirror (PAM) to provide the acquisition spiral scan, and the second FSM in the system, element (8), is used to reject jitter. The third FSM, element (12), is utilized to optically induce jitter for testing purposes. The receive detectors for T1, element (27), and for T2 are custom reprogrammable focal plane gate array (FPGA) detectors built in-house [2].…”

Section: Hardwarementioning

confidence: 99%

Development of a lasercom testbed for the pointing, acquisition, and tracking subsystem of satellite-to-satellite laser communications link

2008

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A lasercom pointing, acquisition, and tracking (PAT) testbed has been developed at The Aerospace Corporation. The current setup represents a GEO-to-GEO link, but depending on the target PAT subsystem, this testbed can be reconfigured. No communication aspects are currently implemented. The system operates in small beam space and consists of a far field space simulator, and two identical lasercom terminals implemented with representative hardware (fast steering mirrors, optical detectors, etc.) and differentiated only by two laser sources operating at visible wavelengths of 473 nm and 633 nm. In this paper, the design process will be examined, and aspects of the pointing accuracy will be discussed.

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“…Despite its advantages, wireless optical communication suffers from several drawbacks such as line-of-sight (LOS) requirement and eye safety regulations which limit the communication distance and data rate. Traditionally, bulky opto-electro-mechanical devices have been utilized for LOS tracking to prevent link interruption [2]. Recently, there has been a wide interest in adopting electronic techniques for such tracking using arrays of photodiodes in the receiver, LED or LASER diodes in the transmitter [3,4].…”

Section: Introductionmentioning

confidence: 99%

CMOS integrated high speed light sensors for optical wireless communication applications

2012

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This work presents a single link CMOS high data rate receiver to be integrated in imaging diversity sensor arrays for optical wireless communication targeting indoor scenarios. To compete with existing radio frequency links, sensing and transmitting data in the hundreds of Mbits per second and above, the proposed data/light sensor is optimized at both the photodetector and circuit levels to provide 5Gps data rate from a single optical link using low cost, high yield standard CMOS technology. A novel photo-detector structure, Triple Well Interrupted N-finger photodiode, is proposed that can achieve a bandwidth up to 10 GHz at 1.2V reverse bias. To compensate for the decreased responsivity of the photodiode, a wideband, high gain and low noise transimpedance amplifier compatible with the speed-enhanced CMOS photodiode is implemented in 0.13µm CMOS technology. The amplifier chain achieves a measured bit error rate (BER) of 10 -12 at 5 Gbps corresponding to 2.8µA input current in presence of 1pF input capacitance representing the photodiode. The die area is 1106µmx895µm including a transimpedance amplifier (TIA), limiter and buffer and the power dissipation is 68mW from a 1.5V DC supply.

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Fine pointing control for optical communications

Cited by 25 publications

References 4 publications

High-performance beam stabilization for next-generation ArF scanner systems

High-performance beam stabilization for next-generation ArF scanner systems

Development of a lasercom testbed for the pointing, acquisition, and tracking subsystem of satellite-to-satellite laser communications link

CMOS integrated high speed light sensors for optical wireless communication applications

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