Fine-Tooth Iron-Core Linear Synchronous Motor for Low Acoustic Noise Applications

Yoon, Jun Young; Lang, Jeffrey H.; Trumper, David L.

doi:10.1109/tie.2018.2835416

Cited by 25 publications

(9 citation statements)

References 22 publications

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“…In that paper, the author reduces the spatial‐frequency magnetic field by optimizing electromagnetic field design. The results show that this new type of motor can achieve 28% higher shear stress, compared to a common motor, and its output power can reach 500 W/mm 34 …”

Section: Linear Motormentioning

confidence: 95%

Section: Linear Motormentioning

confidence: 99%

“…The results show that this new type of motor can achieve 28% higher shear stress, compared to a common motor, and its output power can reach 500 W/mm. 34 Although the iron-core linear motors can realize long stroke, to achieve a nano-level precision motion in a photolithography system, it requires linear motors combined with the advantages of other motors. Take ASML photolithography system Twinscan XT 1950i as an example, the maximum speed of the Y-direction long-stroke linear F I G U R E 9 Schematic view of air-bearings in X-direction.…”

Section: Linear Motormentioning

confidence: 99%

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Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review

Song

Chen

Huo³

et al. 2021

Int Journal of Mech Sys Dyn

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As one of the most advanced and precise equipment in the world, a photolithography scanner is able to fabricate nanometer-scale devices on a chip. To realize such a small dimension, the optical system is the fundamental, but the mechanical system often becomes the bottleneck. In the photolithography, the exposure is a dynamic process. The accuracy and precision of the movement are determined by the mechanical system, which is even more difficult to control compared with the optical system. In the mechanical system, there are four crucial components: the reticle and wafer stages, the linear motor, the metrology system, and the control system. They work together to secure the reticle and substrate locating at the correct position, which determines the overlay and alignment performance in the lithography. In this paper, the principles of these components are reviewed, and the development history of the mechanical system is introduced.

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Section: Linear Motormentioning

confidence: 95%

Section: Linear Motormentioning

confidence: 99%

Section: Linear Motormentioning

confidence: 99%

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Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review

Song

Chen

Huo³

et al. 2021

Int Journal of Mech Sys Dyn

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“…O satisfy linear motion applications, various types of linear actuators have been investigated, leading to an increased interest toward linear direct-drive actuators [1]- [3]. Conventional linear motion technologies are realized by using roller/ball screws, with contact transmission.…”

Section: Introductionmentioning

confidence: 99%

Design and Manufacture of a Linear Actuator Based on Magnetic Screw Transmission

Ling

Zhao

Rasmussen

et al. 2021

IEEE Trans. Ind. Electron.

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This paper proposes a practical design guide for a linear electromagnetic actuator based on the concept of magnetic screw transmission, in which manufacture and assembly technologies are investigated. The surface-inserted design is firstly used to form a required helical-shape magnetic pole, which exhibits simple processing, high precision, and robust structure. Moreover, the three-dimensional finite element analysis (FEA) aided design different topologies are developed, with the goal of optimizing thrust force. Besides, the different number of permanent-magnet (PM) segmentation is firstly proposed to reduce the cogging effect. Afterward, the linear actuator integrates rotary machine and magnetic screw overall together to construct a compact design and decouples the magnetic circuits. The decoupling design focuses on the self-shielding effect of the Halbach PM array, and the special bearing supports are selected to avoid the eccentricity. Finally, a prototype is built using the developed techniques. Experiments are carried out on a linear test bench, verifying the theoretical analysis.

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“…Linear motor is a key component in industrial instruments, transportation systems and household appliances, such as position tracking for DNA analysis, rail transportation, linear motor based lifts and linear compressors, etc. [1][2][3][4][5][6]. Traditionally, a rotary motor combined with a linear lead screw rod is usually employed to realize the linear movement.…”

Section: Introductionmentioning

confidence: 99%

Force and Velocity Ripple Reduction of the New Linear Motor

Tang¹,

Zou

Zhuang

et al. 2021

IEEE Access

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The authors gratefully acknowledge the support from the excellent teacher cultivation program of Hangzhou high education system under the project reference number 2019 [8] and Hangzhou Philosophy and Social Science Research Base Project (New Rural STEAM Education Research Base wx2020001). MeiLing Tang developed the analysis, hardware design and measurement. Yu Zou conducted the simulation of the work. Shengxian Zhuang was responsible for the background theory. Ka Wai Eric Cheng provided the guidance and supervision of the study.

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Fine-Tooth Iron-Core Linear Synchronous Motor for Low Acoustic Noise Applications

Cited by 25 publications

References 22 publications

Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review

Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review

Design and Manufacture of a Linear Actuator Based on Magnetic Screw Transmission

Force and Velocity Ripple Reduction of the New Linear Motor

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