Precise control of the three-dimensional (3D) structure of highly dispersed metal species such as metal complexes and clusters attached to an oxide surface has been important for the development of next-generation high-performance heterogeneous catalysts. However, this is not easily achieved for the following reasons. (1) Metal species are easily aggregated on an oxide surface, which makes it difficult to control their size and orientation definitely. (2) Determination of the 3D structure of the metal species on an oxide powder surface is hardly possible. To overcome these difficulties, we have developed the premodified surface method, where prior to metal deposition, the oxide surface is premodified with a functional organic molecule that can strongly coordinate to a metal atom. This method has successfully provided a single metal dispersion on an oxide single-crystal surface with the 3D structure precisely determined by polarization-dependent total reflection fluorescence X-ray absorption fine structure (PTRF-XAFS). Here we describe our recent results on ultra-high dispersions of various metal atoms on TiO (110) surfaces premodified with mercapto compounds, and show the possibility of fine tuning and orientation control of the surface metal 3D structures.