2013
DOI: 10.1063/1.4789755
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Fine-tuning of whispering gallery modes in on-chip silica microdisk resonators within a full spectral range

Abstract: We investigate an efficient method for fine-tuning whispering gallery mode resonances in disk-type silica microresonators to reach an arbitrary frequency within the free spectral range of the system. This method is based on a post-production hydrofluoric acid etching process to precisely resize the radius of such microresonators. We show the effectiveness of this approach by tuning their resonance frequency within 10 GHz of specific hydrogen cyanide reference lines (P16, P18). This technique allows for simple … Show more

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Cited by 17 publications
(9 citation statements)
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“…Tuning a micron-scale whispering gallery resonator in a fashion that does not add to the footprint of the device or require complicated fabrication is a nontrivial task. The main approaches so far include the use of external heaters 17 18 , application of stress/strain via an external clamp 19 20 21 22 , pressure tuning 23 24 25 26 27 , electric field tuning 28 , chemical etching 29 30 , on-chip resistance heating 31 32 , photorefractive tuning 33 and thermo-optic tuning 34 35 36 . Each of these methods has its own distinct advantages and disadvantages and the choice of method depends ultimately on the final application.…”
mentioning
confidence: 99%
“…Tuning a micron-scale whispering gallery resonator in a fashion that does not add to the footprint of the device or require complicated fabrication is a nontrivial task. The main approaches so far include the use of external heaters 17 18 , application of stress/strain via an external clamp 19 20 21 22 , pressure tuning 23 24 25 26 27 , electric field tuning 28 , chemical etching 29 30 , on-chip resistance heating 31 32 , photorefractive tuning 33 and thermo-optic tuning 34 35 36 . Each of these methods has its own distinct advantages and disadvantages and the choice of method depends ultimately on the final application.…”
mentioning
confidence: 99%
“…On the other hand, the frequency tuning process to increase the resonant frequency was performed in both coarse and fine tunings as recorded in Figure 34 d. More recently, Henze et al . [ 381 ] demonstrated a post-production hydrofluoric acid etching process for fine-tuning microresonators to reach an arbitrary frequency, and a controllable resonant frequency 10 GHz was observed using this effective approach.…”
Section: Passive Frequency Tuning Methodsmentioning
confidence: 99%
“…Various post-fabrication resonance tuning schemes for onchip integrated planar WGM cavities have been investigated, which mainly focus on the real part of mode energies. [36][37][38][39][40][41] Among them, EBID as a convenient and precise tool has been employed for generating additional 3D nanostructures, such as nanopillars on top of microdisks [42] and photonic crystals. [43] In the EBID method, released gaseous molecules get decomposed under the irradiation of a focused electron beam, resulting in the growth of nonvolatile structures on the focus site.…”
Section: Working Principlementioning
confidence: 99%