Finishing of metal optics by ion beam technologies

Bauer, Jens; Frost, Frank; Lehmann, Antje; Ulitschka, Melanie; Li, Yaguo; Arnold, Thomas

doi:10.1117/1.oe.58.9.092612

Cited by 11 publications

(8 citation statements)

References 51 publications

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“…Time consumption is a limitation with this process as the polishing is done at very small spot. Bauer et al carried out IBP of aluminium alloys with oxygen or nitrogen gas for short wavelength [183]. The etching depth was achieved up to 400 nm and 1 µm without disturbing the initial surface topography of the specimen.…”

Section: Ion Beam Polishing (Ibp)mentioning

confidence: 99%

Advances in the design and manufacturing of novel freeform optics

Kumar

Tong

Jiang

2022

Int. J. Extrem. Manuf.

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Freeform optics has become the most prominent element of the optics industry. Advanced freeform optical designs supplementary to ultra-precision manufacturing and metrology techniques have upgraded the lifestyle, thinking, and observing power of existing humans. Imaginations related to space explorations, portability, accessibility have also witnessed sensible in today’s time with freeform optics. Present-day design methods and fabrications techniques applicable in the development of freeform optics and the market requirements are focussed and explained with the help of traditional and non-traditional optical applications. Over the years, significant research is performed in the emerging field of freeform optics, but no standards are established yet in terms of tolerances and definitions. We critically review the optical design methods for freeform optics considering the image forming and non-image forming applications. Numerous subtractive manufacturing technologies including figure correction methods and metrology have been developed to fabricate extreme modern freeform optics to satisfy the demands of various applications such as space, astronomy, earth science, defence, biomedical, material processing, surveillance, and many more. We described a variety of advanced technologies in manufacturing and metrology for novel freeform optics. Next, we also covered the manufacturing-oriented design scheme for advanced optics. We conclude this review with an outlook on the future of freeform optics design, manufacturing and metrology.

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Section: Ion Beam Polishing (Ibp)mentioning

confidence: 99%

Advances in the design and manufacturing of novel freeform optics

Kumar

Tong

Jiang

2022

Int. J. Extrem. Manuf.

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“…With the continuous development of modern optical systems, the application range of optical mirrors, especially complex optical surfaces, is becoming more and more extensive and the manufacturing of these optical surfaces with ultra-high accuracy and surface roughness has extremely strict requirements for the processing technology [ 1 ]. In order to improve the quality and efficiency of optical parts processing, various new polishing methods have emerged in recent years, such as magnetorheological finishing (MRF) [ 2 ], ion beam figuring (IBF) [ 3 ], elastic emission machining (EEM) [ 4 ], fluid jet polishing (FJP) [ 5 ], etc. Among them, abrasive water jet polishing (AWJP) technology mainly realizes material removal through the collision and shear between abrasive particles and workpiece surfaces [ 6 ].…”

Section: Introductionmentioning

confidence: 99%

Theoretical Modeling Method for Material Removal Characteristics of Abrasive Water Jet Polishing under Rotating Oblique Incidence

et al. 2022

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Abrasive water jet polishing (AWJP), as an ultra-precision machining technology, has unique machining advantages. However, the machining application of nozzles in vertical and inclined states is greatly limited because rotational symmetric material removal characteristics and the largest amount of central material removal cannot be obtained. At the same time, considering the many controllable and uncontrollable factors in AWJP, it is difficult to accurately model the removal characteristics obtained by machining. Based on the idea of the Preston equation and the calculation of fluid dynamics, this study first analyzed the material removal characteristics of a single abrasive particle and used FLUENT fluid simulation software to obtain the pressure and velocity distributions at different positions in the processes of nozzle rotation and tilt polishing. By analyzing the influence of the pressure and velocity distributions on material removal and the surface shear stress of the workpiece, a theoretical model of the material removal characteristics of abrasive water jet polishing under rotating oblique incidence was established. Finally, the effectiveness of the theoretical removal model was verified by comparing and analyzing experimental and theoretical results.

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“…Increasing demands on accuracy of surface quality for applications in the shortwavelength range claim improved ultra-precise surface machining techniques. Reactive ion beam etching (RIBE) is one promising surface machining technique to improve figure accuracy and surface finish [8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

“…A model scheme is suggested, based upon the in-situ formation of a surface oxide or nitride layer with a constant thickness of about 12 -15 nm. The chemically modified layer acts as a passivation layer inhibiting aluminium surface mobility and compositional inhomogeneity, thus preserving the initial surface topography during RIBE machining [8,9]. However, during irradiation of the aluminium surface with nitrogen gas, the reflectivity of the optical surface is decreased and surface errors situated in the microroughness regime are formed.…”

Section: Introductionmentioning

confidence: 99%

Improvement of the optical properties after surface error correction of aluminium mirror surfaces

Ulitschka

Bauer

Frost

et al. 2021

J. Eur. Opt. Soc.-Rapid Publ.

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Ion beam finishing techniques of aluminium mirrors have a high potential to meet the increasing demands on applications of high-performance mirror devices for visible and ultraviolet spectral range. Reactively driven ion beam machining using oxygen and nitrogen gases enables the direct figure error correction up to 1 μm machining depth while preserving the initial roughness. However, the periodic turning mark structures, which result from preliminary device shaping by single-point diamond turning, often limit the applicability of mirror surfaces in the short-periodic spectral range. Ion beam planarization with the aid of a sacrificial layer is a promising process route for surface smoothing, resulting in successfully reduction of the turning mark structures. A combination with direct surface smoothing to perform a subsequent improvement of the microroughness is presented with a special focus on roughness evolution, chemical composition, and optical surface properties. As a result, an ion beam based process route is suggested, which allows almost to recover the reflective properties and an increased long-term stability of smoothed aluminium surfaces.

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Finishing of metal optics by ion beam technologies

Cited by 11 publications

References 51 publications

Advances in the design and manufacturing of novel freeform optics

Advances in the design and manufacturing of novel freeform optics

Theoretical Modeling Method for Material Removal Characteristics of Abrasive Water Jet Polishing under Rotating Oblique Incidence

Improvement of the optical properties after surface error correction of aluminium mirror surfaces

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