First results of outgas resist family test and correlation between outgas specifications and EUV resist development

Abstract

In this paper, we present the first results of witness sample based outgas resist family test to improve the efficiency of outgas testing using EUV resists that have shown proven imaging performance. The concept of resist family testing is to characterize the boundary conditions of outgassing scale from three major components for each resist family. This achievement can significantly reduce the cost and improve the resist outgas learning cycle. We also report the imaging performance and outgas test results of state of the art resists and discuss the consequence of the resist development with recent change of resist outgassing specifications. Three chemically amplified resists selected from higher outgassing materials are investigated, but no significant improvement in resist performance is observed.

Optimization of chemically amplified resist formulation based on simple random sampling and kernel density estimation

“…Therefore, it is necessary to involve multivariate analysis into the optimization framework. Considering the complicated design process of the multivariate analysis experiments, 16 the sampling and estimation method will be a good choice in the optimization work. Applying simple random sampling independently over each CAR parameter’s value range takes into account the characteristics of different CAR parameters in the formulation.…”