2012
DOI: 10.1117/12.929903
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First steps towards a scatterometry reference standard

Abstract: Supported by the European Commission and EURAMET, a consortium of 10 participants from national metrology institutes, universities and companies has recently started a joint research project with the aim of overcoming current challenges in optical scatterometry for traceable linewidth metrology and to establish scatterometry as a traceable and absolute metrological method for dimensional measurements. This requires a thorough investigation of the influence of all significant sample, tool and data analysis para… Show more

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Cited by 12 publications
(13 citation statements)
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“…It means that the method has to be traceable to a reference standard. 66 Although a reference standard is a stable and highly reproducible structure, 67 it is suitable for validation only when measured and cross-checked with other reference methods. 66 As a primary aim, it is also crucial to achieve accurate optical measurements at the industrial level.…”
Section: Methods For Cross-checkingmentioning
confidence: 99%
“…It means that the method has to be traceable to a reference standard. 66 Although a reference standard is a stable and highly reproducible structure, 67 it is suitable for validation only when measured and cross-checked with other reference methods. 66 As a primary aim, it is also crucial to achieve accurate optical measurements at the industrial level.…”
Section: Methods For Cross-checkingmentioning
confidence: 99%
“…In previous contributions these have been applied to various setups in optical metrology. [8][9][10][11][12][13][14][15] In this context, also 3D structures have been investigated. [16][17][18][19] Here we discuss methods for further performance improvements, especially for efficient simulation of 3D devices with complex geometries.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, our FEM Maxwell solver (JCMsuite) has been applied for various tasks in optics design. Among these are the design of microstructured fibers, 6, 7 solar cells, 8 microlithography masks, 9 integrated microlenses, 10 metamaterials, 11 microcavities, 12,13 plasmonic waveguides, 14 scatterometry reference standards, 15 and others. 16 Here, we discuss a method for improvement of numerical performance, so-called hp-FEM.…”
Section: Introductionmentioning
confidence: 99%