Fixed polarizer, rotating-polarizer and fixed analyzer spectroscopic ellipsometer: accurate calibration method, effect of errors and testing

Naciri, A. En; Broch, Laurent; Johann, L.; Kleim, R.

doi:10.1016/s0040-6090(01)01777-1

Cited by 22 publications

(16 citation statements)

References 18 publications

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“…11,14,15 Some errors are eliminated by the double zone technique, which requires several minutes due to the rotation of optical components and is then incompatible to real time measurements. Therefore it is necessary to determine precisely the position of the optical elements according to the wavelength in our configuration.…”

Section: Calibrationmentioning

confidence: 99%

Real time in situ ellipsometric and gravimetric monitoring for electrochemistry experiments

Broch

Johann

Stein³

et al. 2007

Review of Scientific Instruments

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This work describes a new system using real time spectroscopic ellipsometer with simultaneous electrochemical and electrochemical quartz crystal microbalance (EQCM) measurements. This method is particularly adapted to characterize electrolyte/electrode interfaces during electrochemical and chemical processes in liquid medium. The ellipsometer, based on a rotating compensator Horiba Jobin-Yvon ellipsometer, has been adapted to acquire Psi-Delta spectra every 25 ms on a spectral range fixed from 400 to 800 nm. Measurements with short sampling times are only achievable with a fixed analyzer position (A=45 degrees ). Therefore the ellipsometer calibration is extremely important for high precision measurements and we propose a spectroscopic calibration (i.e., determination of the azimuth of elements according to the wavelength) on the whole spectral range. A homemade EQCM was developed to detect mass variations attached to the electrode. This additional instrument provides further information useful for ellipsometric data modeling of complex electrochemical systems. The EQCM measures frequency variations of piezoelectric quartz crystal oscillator working at 5 MHz. These frequency variations are linked to mass variations of electrode surface with a precision of 20 ng cm(-2) every 160 ms. Data acquisition has been developed in order to simultaneously record spectroscopic ellipsometry, EQCM, and electrochemical measurements by a single computer. Finally the electrodeposition of bismuth telluride film was monitored by this new in situ experimental setup and the density of electroplated layers was extracted from the optical thickness and EQCM mass.

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Section: Calibrationmentioning

confidence: 99%

Real time in situ ellipsometric and gravimetric monitoring for electrochemistry experiments

Broch

Johann

Stein³

et al. 2007

Review of Scientific Instruments

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“…Accurate calibration techniques, optimized measurements, and effect of errors in rotating element ellipsometer have been proposed and studied in details (En Naciri et al 2002;Broch et al 2004).…”

Section: Introductionmentioning

confidence: 99%

An Improvement of Scanning Ellipsometer by Rotating a Polarizer and an Analyzer at a Speed Ratio of 1:3

El-Agez¹,

Taya²,

Tayyan³

2011

International Journal of Optomechatronics

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We propose theoretically an improved spectroscopic ellipsometer to study the optical properties of solids. In this system, the polarizer and the analyzer are rotating synchronously in the same direction at a speed ratio 1:3. The light intensity received by the detector contains six Fourier coefficients, one dc and five ac. One can independently extract the ellipsometric parameters as well as the optical constants of a sample using any of six different sets of the Fourier coefficients. A comparison among these sets is presented to find the optimal set corresponding to the minimum percent error in the calculation of the real and imaginary parts of the dielectric function. The results from the simulated spectra of the complex refractive index of c-Si, ZnSe, and GaP are presented.

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“…The coefficients of the 4 × 4 Mueller matrix are deduced from the detected light and require a great precision since small errors on the position of the optical elements have important effects on their values. These errors are called systematic errors and have been studied on other ellipsometer type [5,6].…”

Section: Introductionmentioning

confidence: 99%

Experimental study of the systematic errors for a Mueller matrix double rotating compensator ellipsometer

Piller¹,

Broch²,

Johann³

2008

Phys. Status Solidi (c)

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The Mueller Matrix Ellipsometer based on the optical PC1SC2A arrangement has been developped by Collins a few years ago. We present systematic errors due to a shift of the azimuth of the optical elements (i.e. polarizer, analyzer, the two compensators). This ellipsometer is more sensible to an error due to a compensator than an error due to the analyzer or the polarizer. The errors on some coefficients mij cannot be cancelled but for the other, a four‐zone measurement method is proposed. A two zone method with A = P = ±45° is sufficient for an isotropic sample to eliminate the errors on ρpp. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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Fixed polarizer, rotating-polarizer and fixed analyzer spectroscopic ellipsometer: accurate calibration method, effect of errors and testing

Cited by 22 publications

References 18 publications

Real time in situ ellipsometric and gravimetric monitoring for electrochemistry experiments

Real time in situ ellipsometric and gravimetric monitoring for electrochemistry experiments

An Improvement of Scanning Ellipsometer by Rotating a Polarizer and an Analyzer at a Speed Ratio of 1:3

Experimental study of the systematic errors for a Mueller matrix double rotating compensator ellipsometer

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