Flexible and High Performance Piezoresistive Pressure Sensors Based on Hierarchical Flower-Shaped SnSe₂ Nanoplates

Abstract

Pressure sensors with high sensitivity, broad dynamic response range and short response time are highly desirable to enable applications into robotics and artificial intelligence. Here, a high-performance piezoresistive pressure sensor based on conical frustum-like structured polydimethylsiloxane (PDMS) and naturally formed flowershaped SnSe2 nanoplates is demonstrated. The structured PDMS/Au and SnSe2 nanoplates/Au interdigital electrodes are exploited as the top and down electrodes, respectively. The proposed configuration shows a significantly enhanced sensitivity (433.22 kPa -1 ), when compared with conventional configuration (flat Au film as the bottom interdigital electrodes). The resulting pressure sensor (PDMS/Au/Au/SnSe2) presents broad dynamic response range (0~38.4 kPa), low detection limit (~0.82 Pa), short response time (≈90 μs), and long-term cycle stability (>1000 cycles). Furthermore, large-area sensor arrays are successfully fabricated and can be used to detect both the intensity and distribution of the loaded pressure. Thanks to these merits, we believe that our high-performance pressure sensor is an ideal candidate for practical applications in robotics, smart devices and artificial intelligence.

Untraditional Deformation‐Driven Pressure Sensor with High Sensitivity and Ultra‐Large Sensing Range up to MPa Enables Versatile Applications

“…However, the microstructures are usually flattened by the stress during the pressure loading process due to their elastic characteristic, causing sensitivity degeneration and narrow sensing range of pressure sensors (Figure 1b). [ 42–45 ] Therefore, in this work, we proposed a novel deformation mechanism based on non‐deformable microstructures, which could avoid deformation saturation of elastic layers effectively (Figure 1a (right)). Compared with the compression of elastic microstructures, the penetration of the microstructures into the flat polymer layer is more difficult, which might result in both the high sensitivity and ultra‐large sensing range (Figure 1b).…”

Transduction Mechanisms, Micro-Structuring Techniques, and Applications of Electronic Skin Pressure Sensors: A Review of Recent Advances

“…of TPU@Ag particles. 3D printed mold 5.54 (0–10) 0.123 (10–100) 4.8 × 10 −3 (100–800) 10 Pa/ 800 kPa 20/30 10 4 (L) 0.3 V/- (♡ ) PR C. Yang [ 287 ] 2019 Au-coated PDMS conical frustum-like structures, with interdigitated elec. of SnSe 2 nanoplates covered with Au.…”

Engineered Microstructure Derived Hierarchical Deformation of Flexible Pressure Sensor Induces a Supersensitive Piezoresistive Property in Broad Pressure Range

“…[20,36] Increasing the number of touchpoints by assembling one micropatterned substrate with another rough one, i.e., forming rough-rough microstructures, can also significantly improve the sensitivity of pressure sensors. [39,40] These discoveries reveal the advantages of using tailored, interlocked/roughrough irregular microstructures with large top areas and different heights for fabricating highly sensitive piezoresistive sensors.…”