Wearable pressure sensors with high sensitivity, broad dynamic response range and low detection limit are highly desirable to enable the applications in electronic skins and soft robotics. In this work, we report a high-performance wearable pressure sensor based on microstructured polydimethylsiloxane (PDMS)/Ag and rough polyimide (PI)/Au interdigital electrodes. By tailoring the touchpoints, the resulting pressure sensors show ultrahigh sensitivity (259.32 kPa -1 ), broad dynamic response range (54 kPa) and low detection limit (0.36 Pa). We also systematically investigate the effect of different sensor structural configurations, PDMS geometrical feature, and Ag thickness on the performance of the pressure sensors. Thanks to these merits, the fabricated pressure sensor is capable of real-time monitoring pulse wave, and can act as a part of the mechanical hand to detect weak pressure changes, leading to the great application promise in the fields of biomedical, real-time health monitoring and intelligent robot.

Pressure sensors with high sensitivity, broad dynamic response range and short response time are highly desirable to enable applications into robotics and artificial intelligence. Here, a high-performance piezoresistive pressure sensor based on conical frustum-like structured polydimethylsiloxane (PDMS) and naturally formed flowershaped SnSe2 nanoplates is demonstrated. The structured PDMS/Au and SnSe2 nanoplates/Au interdigital electrodes are exploited as the top and down electrodes, respectively. The proposed configuration shows a significantly enhanced sensitivity (433.22 kPa -1 ), when compared with conventional configuration (flat Au film as the bottom interdigital electrodes). The resulting pressure sensor (PDMS/Au/Au/SnSe2) presents broad dynamic response range (0~38.4 kPa), low detection limit (~0.82 Pa), short response time (≈90 μs), and long-term cycle stability (>1000 cycles). Furthermore, large-area sensor arrays are successfully fabricated and can be used to detect both the intensity and distribution of the loaded pressure. Thanks to these merits, we believe that our high-performance pressure sensor is an ideal candidate for practical applications in robotics, smart devices and artificial intelligence.