Flexible Film Bulk Acoustic Resonator Based on Low-Porosity β-Phase P(VDF-TrFE) Film for Human Vital Signs Monitoring

Yu, Zhentao; Gao, Feng; He, Xiaofeng; Jin, Hao; Dong, Shurong; Cao, Zhen; Luo, Jikui

doi:10.3390/s23042136

Cited by 5 publications

(2 citation statements)

References 40 publications

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“…Gold nanoparticles were coated using an ion sputtering instrument (KYKY SBC-12, Beijing, China ), and the surface morphology and cross-section were measured using field emission scanning electron microscopy (FE-SEM) (Hitachi SU5000, Marunouchi 1-chome, In our previous work, an approach involving two-step annealing and surface etching was employed to effectively eliminate pores within P(VDF-TrFE) films and reduce surface roughness [15]. Since the annealing process has significant influences on P(VDF-TrFE) properties, including the content of β-phase, piezoelectric coefficient, and porosity, a novel three-step annealing process (sample S1) has been developed in this work, achieving good flatness and high density without the need for surface etching and simplifying the fabrication process.…”

Section: Characterization Of P(vdf-trfe) Thin Filmsmentioning

confidence: 99%

Flexible Film Bulk Acoustic Wave Filter Based on Poly(vinylidene fluoride-trifluorethylene)

He,

Lu,

Gao

et al. 2024

Polymers

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Poly(vinylidene fluoride-trifluorethylene) (P(VDF-TrFE)) has promising potential applications in radio-frequency filters due to their excellent piezoelectric properties, flexibility, and stability. In this paper, a flexible film bulk acoustic wave filter is investigated based on P(VDF-TrFE) as piezoelectric film. A new method based on three-step annealing is developed to efficiently remove the porosity inside the P(VDF-TrFE) films so as to improve its properties. The obtained film achieved high β-phase content beyond 80% and a high piezoelectric coefficient of 27.75 pm/V. Based on the low porosity β-phase films, a flexible wide-band RF filter is designed, which consists of a bulk acoustic wave resonator and lumped inductor-capacitor elements as a hybrid configuration. The resonator sets the filter’s center frequency, while the lumped LC-based matching network extends the bandwidth and enhances out-of-band rejection. The testing results of the proposed wide-band filter show its good performance, with 12.5% fractional bandwidth and an insertion loss of 3.1 dB. To verify the possibility of folding and stacking the flexible bulk acoustic wave devices for high-density multi-filter integration in MIMO communication, bending tests of the filter are also conducted with the bending strain range up to 5500 με. The testing results show no noticeable performance degradation after four bending cycles. This work demonstrates the potential of β-phase P(VDF-TrFE) bulk acoustic wave filters to expand the scope of future flexible radio-frequency filter applications.

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Section: Characterization Of P(vdf-trfe) Thin Filmsmentioning

confidence: 99%

Flexible Film Bulk Acoustic Wave Filter Based on Poly(vinylidene fluoride-trifluorethylene)

He,

Lu,

Gao

et al. 2024

Polymers

Self Cite

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“…System-on-chip (SoC) technology, which combines multiple functionalities on a single chip, offers a potential solution for reducing the system area and mitigating insertion losses. Additionally, three-dimensional (3D) integration techniques provide a means of vertically stacking multiple layers of RF components, thereby further reducing the overall system footprint [13][14][15].…”

Section: Introductionmentioning

confidence: 99%

Design, Optimization and Performance Assessment of Single Port Film Bulk Acoustic Resonator through Finite Element Simulation

Patel,

Adhikari,

Tripathi

et al. 2023

Sensors

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In this paper, the study is supported by design, FEA simulation, and practical RF measurements on fabricated single-port-cavity-based acoustic resonator for gas sensing applications. In the FEA simulation, frequency domain analysis was performed to enhance the performance of the acoustic resonator. The structural and surface morphologies of the deposited ZnO as a piezoelectric layer have been studied using XRD and AFM. The XRD pattern of deposited bulk ZnO film indicates the perfect single crystalline nature of the film with dominant phase (002) at 2θ = 34.58°. The AFM micrograph indicates that deposited piezoelectric film has a very smooth surface and small grain size. In the fabrication process, use of bulk micro machined oxide (SiO2) for the production of a thin membrane as a support layer is adopted. A vector network analyzer (Model MS2028C, Anritsu) was used to measure the radio frequency response of the resonators from 1 GHz to 2.5 GHz. As a result, we have successfully fabricated an acoustic resonator operating at 1.84 GHz with a quality factor Q of 214 and an effective electromechanical coupling coefficient of 10.57%.

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Recent Progress on Structure Manipulation of Poly(vinylidene fluoride)‐Based Ferroelectric Polymers for Enhanced Piezoelectricity and Applications

Zhang

Zhu

et al. 2023

Adv Funct Materials

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Poly(vinylidene fluoride) (PVDF)‐based polymers demonstrate great potential for applications in flexible and wearable electronics but show low piezoelectric coefficients (e.g., −d33 < 30 pC N−1). The effective improvement for the piezoelectricity of PVDF is achieved by manipulating its semicrystalline structures. However, there is still a debate about which component is the primary contributor to piezoelectricity. Therefore, current methods to improve the piezoelectricity of PVDF can be classified into modulations of the amorphous phase, the crystalline region, and the crystalline–amorphous interface. Here, the basic principles and measurements of piezoelectric coefficients for soft polymers are first discussed. Then, three different categories of structural modulations are reviewed. In each category, the physical understanding and strategies to improve the piezoelectric performance of PVDF are discussed. In particular, the crucial role of the oriented amorphous fraction at the crystalline–amorphous interface in determining the piezoelectricity of PVDF is emphasized. At last, the future development of high performance piezoelectric polymers is outlooked.

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Flexible Film Bulk Acoustic Resonator Based on Low-Porosity β-Phase P(VDF-TrFE) Film for Human Vital Signs Monitoring

Cited by 5 publications

References 40 publications

Flexible Film Bulk Acoustic Wave Filter Based on Poly(vinylidene fluoride-trifluorethylene)

Flexible Film Bulk Acoustic Wave Filter Based on Poly(vinylidene fluoride-trifluorethylene)

Design, Optimization and Performance Assessment of Single Port Film Bulk Acoustic Resonator through Finite Element Simulation

Recent Progress on Structure Manipulation of Poly(vinylidene fluoride)‐Based Ferroelectric Polymers for Enhanced Piezoelectricity and Applications

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