Abstract:We report the development of on-chip optical components designed to improve the out-coupling of double-metal terahertz (THz) frequency quantum cascade lasers (QCLs). A visible reshaping of the optical beam is achieved, independent of the precise waveguide configuration, by direct incorporation of cyclic-olefin copolymer (COC) dielectric optical fibers onto the QCL facet. A major improvement is further achieved by incorporating a micromachined feed-horn waveguide, assembled around the THz QCL and integrated with a slit-coupler. In its first implementation, we obtain a ± 20° beam divergence, offering the potential for high-efficiency radiation coupling from a metal-metal waveguide into optical fibers.