Flexible micro-processing by multiple microrobots in SEM

Abstract

In this paper, we describe the newly developed flexible micro processing system assisted by 1 inch size robots in the scanning electron microscope. After showing the overall system, the basic performances of the small robot that is composed of piezo elements and electromagnets are presented and then the magnetic shield property is considered to prevent the SEM image distortion due to magnetic flux.In order to handle some small objects, the electrostatic micro manipulator driven by the piezo bimorph is also incorporated on the robot . And the small sliding table on the robot can transport them at SEM focusing point accurately. This arrangement can allow the x-y accurate positioning at any location within the chamber. On the sample table, a micro manipulator from another small robot can pickup and down the small objects simultaneously. In addition, the fiber guided YAG-laser is also employed to provide the micro material abrasion. The operator can control each small robot easily with the help of the real time monitoring of SEM image and the PC assisted interface. This collaboration of small robots have interesting benefit for providing both flexible and accurate micro processing in the SEM with good operability.

State of the art: micro-nanorobotic manipulation in single cell analysis

“…Electrostatic actuation is one widely used technique in the development of MEMS device, which allows both the precise actuating and sensing. For example, many micro-nanomanipulators, like the microgripper, are designed based on electrostatic mechanism [82,83]. However, the short moving distance is one problem for electrostatic actuation, which is usually less than several millimeters.…”

Fundamental Principles and Issues of High-speed Piezoactuated Three-legged Motion for Miniature Robots Designed for Nanometer-scale Operations

“…The lack of predicting the exact time required to execute a particular subtask may cause a major bottleneck in the pipeline and hence decrease substantially the overall throughput of the system. The proposed model is very different from other micro/nanofactory approaches (Breguet, Schmitt, and Clavel 2000) including the use of an SEM as the main platform (Aoyama and Fuchiwaki 2001). Unlike other approaches, the aim of the proposed platform is to maximize the throughput of operations performed at the nanoscale.…”

A novel wireless and mobile piezoelectric micro robot

“…There are some driving principles for actuating the piezoelectric micro-robots. One is the inchworm-like driving principle [9][10][11][12]. The principle is based on dry friction resulting from reaction force to gravity.…”