Flexible nanoimprint mold based on a commercial SEBS thermoplastic elastomer

Chen, H.T; Trefilov, D; Cui, Yongyin; Yuan, Chin; Ge, Huang-Rong; Hu, Xiao Hong; Cui, Boqiang

doi:10.1201/9781315227047-52

Cited by 1 publication

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“…Various technologies have been used to develop micropatterns on curved surfaces, including microcontact printing [22], step-and-flash imprint lithography [23], soft lithography [24,25,26], vapor-assisted imprinting [27], 3D nanomolding with a thin soft stamp [28], microwrinkling [29], inkjet printing [30], and wrapping of a flexible patterned substrate over a curved object [31]. Among these technologies, the soft lithography or imprinting has been used most popularly owing to its simple and effective process capability, in which flexible polymer stamps are used to replicate micro/nanoscale patterns on curved surfaces [32,33,34].…”

Section: Introductionmentioning

confidence: 99%

Development of Micropatterns on Curved Surfaces Using Two-Step Ultrasonic Forming

Park

2019

Micromachines

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Nanoimprint lithography (NIL) is a micro/nanoscale patterning technology on thermoplastic polymer films, and has been widely used to fabricate functional micro/nanoscale patterns. NIL was also used to develop micro/nanoscale patterns on curved surfaces by employing flexible polymer stamps or micropatterned metal molds with macroscopic curvatures. In this study, two-step ultrasonic forming was used to develop micropatterns on a curved surface out of a flat metal stamp, by connecting ultrasonic imprinting and stretching processes. Ultrasonic imprinting was used to replicate functional micropatterns on a flat polymer film, using a flat ultrasonic horn and micropatterned metal stamps with prism and dot micropatterns. An ultrasonic stretching process was then used to form a curvature on the patterned film using a curved ultrasonic horn and a soft mold insert, to avoid damage to the pre-developed micropatterns. The ultrasonic horn was designed to have three different tip radii, and the resulting forming depth and curvature formation were investigated experimentally. As a result, three different curved surfaces containing two different micropatterns were obtained. The developed curved films containing micropatterns were then evaluated optically, and showed different optical diffusion and illumination characteristics according to the film curvature and micropattern type. These results indicate that the proposed technology can extend the functionality of conventional micropatterned products by imposing appropriate curvatures.

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Section: Introductionmentioning

confidence: 99%

Development of Micropatterns on Curved Surfaces Using Two-Step Ultrasonic Forming

Park

2019

Micromachines

View full text Add to dashboard Cite

show abstract

Flexible nanoimprint mold based on a commercial SEBS thermoplastic elastomer

Cited by 1 publication

References 1 publication

Development of Micropatterns on Curved Surfaces Using Two-Step Ultrasonic Forming

Development of Micropatterns on Curved Surfaces Using Two-Step Ultrasonic Forming

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