Flexible Photonic Probes for New-Generation Brain–Computer Interfaces

Chen, Zequn; Li, Lan

doi:10.1021/accountsmr.0c00113

Cited by 5 publications

(3 citation statements)

References 24 publications

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“…Therefore, our method has proved that it could not only realize the fabrication of flexible HIC photonics from materials requiring high-temperature deposition but also maintain superior device performance while greatly simplifying the process steps and improving the yield. And such a symmetrical structure design, in which the optical characteristics remain well under mechanical deformation, holds great potential for conformal optical sensing [19,27,45] and bioapplications such as flexible brain machine photonic probes, [4,46] optical cochlea, [47,48] etc.…”

Section: Flexible Integrated Photonic Devices Based On Pecvd Sinmentioning

confidence: 99%

“…By operating in various states, devices can be regulated and controlled to optimize their unique optical properties. Therefore, flexibility in photonics offers great advantages and potential applications in a wide range of unconventional and emerging fields, including photonic skin, [ 1 ] conformal sensing, [ 2,3 ] optogenetic stimulation probes, [ 4–7 ] optical communication, [ 8–12 ] etc.…”

Section: Introductionmentioning

confidence: 99%

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A Universal Approach to High‐Index‐Contrast Flexible Integrated Photonics

Chen

Shi

Wei

et al. 2023

Advanced Optical Materials

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stimulation probes, [4][5][6][7] optical communication, [8][9][10][11][12] etc.Polymers have been commonly used to fabricate flexible photonic devices due to their natural flexibility and low-temperature film deposition. [13][14][15] However, a low-refractive-index contrast between the polymer core structures and cladding substrates cannot allow strong optical confinement, which often leads to the large size of the fabricated devices and is not conducive to high-density integration. In comparison with polymers, silicon-based materials, [16] inorganic oxides, [17,18] and chalcogenide glass [19] materials show high refractive index and low absorption loss, enabling a large degree of freedom in obtaining functional optical structures for strong optical confinement on flexible substrates. [20][21][22][23] It is innately advantageous to realize compact, flexible photonic devices using an inorganic-organic hybrid structure consisting of inorganic core material and organic cladding substrate. [24] Nowadays, the manufacturing processes of high-index-contrast (HIC) flexible integrated photonic devices are based on pattern transfer [25][26][27] and monolithic integration. [16,28] Among the many materials used for flexible photonics, silicon-based flexible devices were prepared by transferring nanostructures from a rigid carrier wafer to the flexible substrate via under-cut etching of the sacrificial oxide layer. [26,27] Hydrofluoric acid (HF) is often used during this process, which etches optical films like silicon nitride (SiN), resulting in device degradation. [26] Flexible integrated photonics is an essential technology for emerging applications, including flexible optical interconnects, optogenetic stimulation, and implantable conformal sensing. Here, a novel and universal route for fabricating flexible photonic components with high-refractive-index contrast is reported. Central to such a unique method is the utilization of germanium oxide (GeO) as the sacrificial layer for releasing nanostructures from rigid substrates to flexible substrates. Various high-quality inorganic optical materials can be grown directly on GeO by different thin-film deposition methods due to its resistance to both high temperature and high-power oxygen plasmas. In addition to the absence of restrictions on the material choices and integration processes for flexible photonic structures, the approach uses water as the etchant to remove the sacrificial layer, which has minimal impact on the optical performance of the photonic structures. Using this approach, a strain-insensitive/sensitive microring resonator based on plasma-enhanced chemical vapor deposited silicon nitride and reactive sputtered titanium oxide, respectively, is demonstrated, establishing the strategy as a facile and universal route for the fabrication of high-index-contrast flexible integrated photonic devices with various functionalities.

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Section: Flexible Integrated Photonic Devices Based On Pecvd Sinmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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A Universal Approach to High‐Index‐Contrast Flexible Integrated Photonics

Chen

Shi

Wei

et al. 2023

Advanced Optical Materials

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Flexible passive integrated photonic devices with superior optical and mechanical performance

Luo

Sun

et al. 2022

Opt. Express

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Flexible integrated photonics is a rapidly emerging technology with a wide range of possible applications in the fields of flexible optical interconnects, conformal multiplexing sensing, health monitoring, and biotechnology. One major challenge in developing mechanically flexible integrated photonics is the functional component within an integrated photonic circuit with superior performance. In this work, several essential flexible passive devices for such a circuit were designed and fabricated based on a multi-neutral-axis mechanical design and a monolithic integration technique. The propagation loss of the waveguide is calculated to be 4.2 dB/cm. In addition, we demonstrate a microring resonator, waveguide crossing, multimode interferometer (MMI), and Mach–Zehnder interferometer (MZI) for use at 1.55 µm, each exhibiting superior optical and mechanical performance. These results represent a significant step towards further exploring a complete flexible photonic integrated circuit.

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Flexible waveguide integrated thermo-optic switch based on TiO₂ platform

et al. 2023

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Mechanically flexible photonic devices are critical components of novel bio-integrated optoelectronic and high-end wearable systems, in which thermo-optic switches (TOSs) as optical signal control devices are crucial. In this paper, flexible titanium oxide (TiO2) TOSs based on a Mach–Zehnder interferometer (MZI) structure were demonstrated around 1310 nm for, it is believed, the first time. The insertion loss of flexible passive TiO2 2 × 2 multi-mode interferometers (MMIs) is −3.1 dB per MMI. The demonstrated flexible TOS achieves power consumption (Pπ) of 0.83 mW, compared with its rigid counterpart, for which Pπ is decreased by a factor of 18. The proposed device could withstand 100 consecutive bending operations without noticeable degradation in TOS performance, indicating excellent mechanical stability. These results provide a new perspective for designing and fabricating flexible TOSs for flexible optoelectronic systems in future emerging applications.

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Flexible Photonic Probes for New-Generation Brain–Computer Interfaces

Cited by 5 publications

References 24 publications

A Universal Approach to High‐Index‐Contrast Flexible Integrated Photonics

A Universal Approach to High‐Index‐Contrast Flexible Integrated Photonics

Flexible passive integrated photonic devices with superior optical and mechanical performance

Flexible waveguide integrated thermo-optic switch based on TiO₂ platform

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Flexible Photonic Probes for New-Generation Brain–Computer Interfaces

Cited by 5 publications

References 24 publications

A Universal Approach to High‐Index‐Contrast Flexible Integrated Photonics

A Universal Approach to High‐Index‐Contrast Flexible Integrated Photonics

Flexible passive integrated photonic devices with superior optical and mechanical performance

Flexible waveguide integrated thermo-optic switch based on TiO2 platform

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Product

Resources

About

Flexible waveguide integrated thermo-optic switch based on TiO₂ platform