Flexible Self-Powered Tactile Sensors Based on Hydrothermally Grown ZnO Nanorods

Zhang, Yanfang; Lu, Guangpan; Chen, Ming; Liu, Yurong; Yao, Ruohe

doi:10.1109/jsen.2022.3176655

Cited by 14 publications

(6 citation statements)

References 36 publications

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“…Then the voltage is restored to the initial value when the pressure is maintained, which indicates that the FS is driven by piezoelectricity rather than by triboelectricity. Finally, a maximum voltage of about 590 mV is observed in the released state which is similar to the previous work [30].…”

Section: Fabrication Of the Fsssupporting

confidence: 89%

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A flexible and ultra-highly sensitive tactile sensor based on Mg-doped ZnO nanorods for human vital signs and activity monitoring

Yao

Liu

2023

Semicond. Sci. Technol.

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Development of high-performance nano-ZnO based piezoelectric tactile sensors with outstanding sensitivity, good linearity, flexibility, durability and biocompatibility has a great significance for smart robotics, human healthcare devices, smart sensors and electronic skins. A flexible piezoelectric pressure sensor with a sandwich structure was fabricated by using PI/Cu film as top and bottom electrodes, Mg-doped ZnO nanorods (MZO NRs) as sensing layer and PDMS polymer as charge coupling layer. The MZO NRs were synthesized by a one-step hydrothermal method and their structure, morphology and defect states were characterized by using scanning electron microscopy (SEM), atomic force microscope (AFM) and X-ray photoelectron spectroscopy (XPS). The piezoelectric properties of the flexible tactile sensors based on MZO NRs hydrothermally synthesized from different Mg2+/Zn2+ molar ratios were investigated comparatively by evaluating their force response actions. The results indicate that the sensors exhibit a linear response in the range of 0-1 N. The device based on MZO NRs can achieve an ultra-high sensitivity of 3.1 V/N (308.5 mV/kpa) due to higher piezoelectric coefficient of MZO NRs, which is about 5 times higher than that of the undoped ZnO NRs sensor. Moreover, the sensor shows excellent stability and durability by loading 2500 cycles of pressing. It is demonstrated that the sensor can used to accurately monitor human motion status and vital signs in real time, such as facial motion, joint movement, wrist pulse, cervical artery, and heartbeat.

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Section: Fabrication Of the Fsssupporting

confidence: 89%

“…X-ray photoelectron spectroscopy (XPS) (Thermo Fisher Scientific K-Alpha) was used to investigate the elements and the chemical states of composition. Piezoelectric response characteristics of the sensors were carried out with a self-built test platform, which is similar with our previous published literature [30].…”

Section: Characterizationsmentioning

confidence: 79%

A flexible and ultra-highly sensitive tactile sensor based on Mg-doped ZnO nanorods for human vital signs and activity monitoring

Yao

Liu

2023

Semicond. Sci. Technol.

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“…The sensor exhibits a high sensitivity of 974 mV N −1 and the wide linear range of 0.1-1 N, and it has been successfully used to monitor nger bending. 170 6 Recent advances of triboelectric micro-pressure sensors for wearable health monitoring Recently, triboelectric nanogenerators (TENGs) pressure sensors have been used widely in self-powered exible wearable electronics for health monitoring due to its excellent performance in energy harvesting and sensing. 171 The triboelectric micro-pressure sensor consists of a couple of triboelectric active layers and electrodes.…”

Section: Motion Monitoringmentioning

confidence: 99%

“…The sensor exhibits a high sensitivity of 974 mV N −1 and the wide linear range of 0.1–1 N, and it has been successfully used to monitor finger bending. 170 …”

Section: Recent Advances Of Piezoelectric Micro-pressure Sensors For ...mentioning

confidence: 99%

Recent progress in flexible micro-pressure sensors for wearable health monitoring

Dun

Geng

et al. 2023

Nanoscale Adv.

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“…Micro-electromechanical devices such as piezo tactile sensors [1], electronic skin [2], nano-piezo field-effect transistor (FET) [3], functional nanogenerator [4], and energy harvesting nano devices [5], are inexorably dependent on emerging piezoelectric materials. These devices primarily require piezoelectric material which can be in various forms from thin films to monocrystalline forms.…”

Section: Introductionmentioning

confidence: 99%

Simulation study of ZnO nanorod geometry for the development of high-performance tactile sensors and energy harvesting devices

Ahmed,

Kumar

2024

Phys. Scr.

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ZnO exhibits an excellent piezoelectric response and can transduce mechanical energy into electrical signals by applying pressure. In particular, vertically aligned ZnO nanorods were thought to be of great importance because of their higher value of piezoelectric coefficient along the z-direction. In this study, various geometries of ZnO nanorods are explored and their effect on the strength of piezoelectric output potential is simulated using COMSOL Multiphysics software. The simulation results show that out of many geometries and inclinations of ZnO nanorods, the highest piezoelectric output is demonstrated by the inclined ZnO nanorods due to the application of higher torque force or shear stress in similar applied force. The high torque force or shear stress at 60⁰ orientation and optimized contributions from all the piezoelectric coefficients resulted in a high piezoelectric output potential close to 215 mV which is much higher than the vertically aligned ZnO nanorod which is approximately 25 mV.

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Flexible Self-Powered Tactile Sensors Based on Hydrothermally Grown ZnO Nanorods

Cited by 14 publications

References 36 publications

A flexible and ultra-highly sensitive tactile sensor based on Mg-doped ZnO nanorods for human vital signs and activity monitoring

A flexible and ultra-highly sensitive tactile sensor based on Mg-doped ZnO nanorods for human vital signs and activity monitoring

Recent progress in flexible micro-pressure sensors for wearable health monitoring

Simulation study of ZnO nanorod geometry for the development of high-performance tactile sensors and energy harvesting devices

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