2014
DOI: 10.1002/aic.14547
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Flow and temperature patterns in an inductively coupled plasma reactor: Experimental measurements and CFD simulations

Abstract: Measurements of temperature patterns in an inductively coupled plasma (ICP) have been carried out experimentally. Plasma torch was operated at different RF powers in the range of 3-14 kW at near atmospheric pressure and over a wide range of sheath gas flow rate (3-25 lpm). Measurements were made at five different axial positions in ICP torch. The chordal intensities were converted into a radial intensity profile by Abel Inversion technique. Typical radial temperature profile shows an off-axis temperature peak,… Show more

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Cited by 7 publications
(6 citation statements)
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“…The axial velocity profiles of the present model predictions were matched with the experimental data of Punjabi et al [21] for the centerline (axial position of z = 58 mm as in Punjabi et al [21]. The boundary conditions and geometry chosen were identical to the ones considered by Punjabi et al [21].…”
Section: Velocity Profilesmentioning
confidence: 72%
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“…The axial velocity profiles of the present model predictions were matched with the experimental data of Punjabi et al [21] for the centerline (axial position of z = 58 mm as in Punjabi et al [21]. The boundary conditions and geometry chosen were identical to the ones considered by Punjabi et al [21].…”
Section: Velocity Profilesmentioning
confidence: 72%
“…Similarly, for a higher sheath gas flow rate of 25 lpm and power of 10 kW, as shown in Figure 4B, the deviation was found to be around 10%. The present model predictions have been validated with in-house experimental data [21]. The radial temperature profiles at an axial location of 192 mm (in the centerline of the coil region) are shown in Figure 4A while axial temperature profiles are shown in Figure 4B.…”
Section: Temperature Profilesmentioning
confidence: 87%
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“…Initially, we proceed by correlating numerical results and experimental measurements obtained by Punjabi et al [ 50 ] using optical emission spectroscopy under the same operational conditions. In Figure 3 , the radial temperature profile is represented in the region of the coil’s centerline for plasma (z = 192 mm) at 7.5 kW with a 10 lpm sheath gas flow rate and a 60 mm diameter tube.…”
Section: Resultsmentioning
confidence: 99%