Fluorine Compounds, Inorganic, Tungsten

Abstract

Although several binary tungsten‐fluorine and some tungsten oxy‐fluoro compounds are known, tungsten hexafluoride is the only compound of commercial importance. The principal use of tungsten hexafluoride is for blanket and selective chemical vapor deposition of tungsten and tungsten silicide films in the manufacture of electronic devices. This article reviews the physical and chemical properties of tungsten hexafluoride, as well as its manufacture, specifications, handling, toxicity, and uses.