2000
DOI: 10.1116/1.1319690
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Focused electron beam induced deposition of gold

Abstract: Codeposition of hydrocarbons is a severe problem during focused electron beam writing of pure metal nanostructures. When using organometallic precursors, a low metal content carbonaceous matrix embedding and separating numerous nanosized metal clusters is formed. In this work, we present a new and easy approach to obtain high purity gold lines: the use of inorganic PF3AuCl as a precursor. Electrical resistivities as low as 22 μΩ cm at 295 K (ten times the bulk Au value) were obtained. This is to our knowledge … Show more

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Cited by 157 publications
(143 citation statements)
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“…In the literature various methods are discussed to obtain an increase of the electrical conductivity [9]. Among these methods are: careful selection of the electron beam parameters used for the deposition [26], annealing of the samples in reactive atmosphere [27] and deposition from carbon-free precursors [28]. Postgrowth electron beam irradiation has been used to tailor the grain size of Pt nanocrystallites and to increase the electrical conductivity in deposits grown from the carbon-free Pt(PF3)4 precursor [29].…”
Section: Discussionmentioning
confidence: 99%
“…In the literature various methods are discussed to obtain an increase of the electrical conductivity [9]. Among these methods are: careful selection of the electron beam parameters used for the deposition [26], annealing of the samples in reactive atmosphere [27] and deposition from carbon-free precursors [28]. Postgrowth electron beam irradiation has been used to tailor the grain size of Pt nanocrystallites and to increase the electrical conductivity in deposits grown from the carbon-free Pt(PF3)4 precursor [29].…”
Section: Discussionmentioning
confidence: 99%
“…16 In recent years, considerable progress has been made in the fabrication of metallic nanostructures in a controlled manner, including features in the 10-50 nm range. [17][18][19][20][21][22][23][24][25][26] Metallic particles with a variety of shapes and dimensions are now readily available for experiments. A thorough understanding of the detailed local fields associated with plasmon resonant particles is therefore warranted, to enhance the design and optimization of applications based on these particles.…”
Section: Introductionmentioning
confidence: 99%
“…It should be noted that considerable progress has been made in recent years in the fabrication of metallic nanostructures in a controlled manner, including features in the 10-50 nm range [19,20,21,22,23,24,25,26,27,28]. Metallic particles with a variety of shapes and dimensions are now readily available for experiments.…”
Section: Introductionmentioning
confidence: 99%