Focused ion beams
are becoming important tools in nanofabrication.
The underlying physical processes in the substrate were already explored
for several projectile ions. However, studies of ion interaction with
precursor molecules for beam-assisted deposition are almost nonexistent.
Here, we explore the interaction of various projectile ions with iron
pentacarbonyl. We report fragmentation patterns of isolated gas-phase
iron pentacarbonyl after interaction with 4He+ at a collision energy of 16 keV, 4He2+ at
16 keV, 20Ne+ at 6 keV, 20Ne4+ at 40 keV, 40Ar+ at 3 keV, 40Ar3+ at 21 keV, 84Kr3+ at 12 keV,
and 84Kr17+ at 255 keV. These projectiles cover
interaction regimes ranging from collisions dominated by nuclear stopping
through collisions dominated by electronic stopping to soft resonant
electron-capture interactions. We report a surprising efficiency of
Ne+ in the Fe(CO)5 decomposition. The interaction
with multiply charged ions results in a higher content of parent ions
and slow metastable fragmentation due to the electron-capture process.
The release of CO groups during the decomposition process seems to
take off a significant amount of energy. The fragmentation mechanism
may be described as Fe being trapped within a CO cluster.