“…After their works, various three-dimensional micro-sculptures such as Venus statues (Serbin et al, 2003), an opera house (Straub, 2004), jars (Park et al, 2005), and gears (Sun et al, 2004) have been demonstrated using this nonlinear lithographic technique. Functional devices such as full three-dimensional photonic crystals (Deubel et al, 2004), plasmonic elements (Reinhardt et al, 2006) and optically-driven microsystems (Maruo et al, 2003) were also reported. Femtosecond laser lithography is a truly three-dimensional process because of its capability of direct exposure of the internal volume, whereas conventional single-photon lithography is based on its planar nature.…”