Form-Birefringence in ITO Thin Films Engineered by Ultrafast Laser Nanostructuring

Cerkauskaite, Ausra; Drevinskas, Rokas; Solodar, Asi; Abdulhalim, Ibrahim; Kazansky, Peter G.

doi:10.1021/acsphotonics.7b01082

Cited by 51 publications

(32 citation statements)

References 38 publications

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“…Inside this pattern, a finer periodicity (≈150 nm) is often observed, a value close to the lowest ones reported. [ 16 ] Such short periods were observed upon fs‐laser irradiation at a much lower scanning speed (≈1 mm s −1 ) and the LIPSS were oriented perpendicular to the laser polarization instead. In our case, these fine HSF‐LIPSS are also observed at the edges of the overlap regions of consecutive scans when the polarization is parallel to the scan direction (cf.…”

Section: Resultsmentioning

confidence: 99%

“…For what concerns functionality, thin ITO films irradiated with fs‐laser pulses develop a strong form birefringence (|Δ n | ≈ 0.2) related to deeply ablated ⊥‐LIPSS (Λ ≈ λ/9) formed upon slow sample scanned irradiation. [ 16 ] The same structures were subsequently used for liquid crystal alignment layers. [ 18 ] More recently, a hybrid approach combining direct laser interference patterning (DLIP) and LIPSS has been used to produce anisotropic conductance structures.…”

Section: Introductionmentioning

confidence: 99%

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Anisotropic Resistivity Surfaces Produced in ITO Films by Laser‐Induced Nanoscale Self‐organization

López‐Santos

Puerto

Siegel

et al. 2020

Advanced Optical Materials

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emitting diodes, flat panel displays, etc.) and energy harvesting (photovoltaics, low emissivity coatings, etc.). [1] They are produced by creating electron degeneracy in a wide bandgap oxide either introducing non-stoichiometry (solid solutions) and/ or appropriate dopants, like Sb or F. [2] This is usually achieved in mixtures of different Group III oxides with metal oxides where the metal can be a part of the semiconductor oxide or act as dopant. This leads to different families of TCOs including AZO (aluminum zinc oxide), IZO (indium zinc oxide), ITO (indium tin oxide), GZO (gallium zinc oxide), and so on. Among them ITO (typically ≈90% wt% In 2 O 3 + 10 wt% SnO 2) plays a key role, especially to produce transparent conductive electrodes (TCEs) in flat-panel displays. Regarding the structuring of ITO films, although wet chemical etching is suitable for producing micron-width electrodes, the need for rapid, and mask-less patterning of large areas led to investigation of the use of laser structuring already in the late 90s. [3] A similarly important application of lasers for processing TCOs is their use for sintering spin-coated films formed by nanoparticles, especially on flexible substrates. [4-6] However, the peculiarities of its absorption spectrum and the regular use of transparent substrates impose limitations in Highly anisotropic resistivity surfaces are produced in indium tin oxide (ITO) films by nanoscale self-organization upon irradiation with a fs-laser beam operating at 1030 nm. Anisotropy is caused by the formation of laser-induced periodic surface structures (LIPSS) extended over cm-sized regions. Two types of optimized structures are observed. At high fluence, nearly complete ablation at the valleys of the LIPSS and strong ablation at their ridges lead to an insulating structure in the direction transverse to the LIPSS and conductive in the longitudinal one. A strong diminution of In content in the remaining material is then observed, leading to a longitudinal resistivity ρ L ≈ 1.0 Ω•cm. At a lower fluence, the material at the LIPSS ridges remains essentially unmodified while partial ablation is observed at the valleys. The structures show a longitudinal conductivity two times higher than the transverse one, and a resistivity similar to that of the pristine ITO film (ρ ≈ 5 × 10 −4 Ω•cm). A thorough characterization of these transparent structures is presented and discussed. The compositional changes induced as laser pulses accumulate, condition the LIPSS evolution and thus the result of the structuring process. Strategies to further improve the achieved anisotropic resistivity results are also provided.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Anisotropic Resistivity Surfaces Produced in ITO Films by Laser‐Induced Nanoscale Self‐organization

López‐Santos

Puerto

Siegel

et al. 2020

Advanced Optical Materials

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“…A well-designed LIPSS pattern could transform into a vivid hologram pattern when illuminated by white light [12]. In optical data storage, LIPSS with different orientations could record different types of information [13].…”

Section: Manipulation Of Lipss Orientation On Silicon Surfaces Using mentioning

confidence: 99%

Manipulation of LIPSS orientation on silicon surfaces using orthogonally polarized femtosecond laser double-pulse trains

Liu¹,

Jiang²,

Han³

et al. 2019

Opt. Express

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Laser-induced periodic surface structures (LIPSS) provide an easy and costeffective means of fabricating gratings and have been widely studied in recent decades. To overcome the challenge of orientation controllability, we developed a feasible and efficient method for manipulating the orientation of LIPSS in real time. Specifically, we used orthogonally polarized and equal-energy femtosecond laser (50 fs, 800 nm) double-pulse trains with time delay about 1ps, total peak laser fluence about 1.0 J/cm 2 , laser repetition frequency at 100 Hz and scanning speed at 150 μm/s to manipulate the LIPSS orientation on silicon surfaces perpendicular to the scanning direction, regardless of the scanning paths. The underlying mechanism is attributed to the periodic energy deposition along the direction of surface plasmon polaritons (SPPs), which can be controlled oriented along the scanning direction in orthogonally polarized femtosecond laser double-pulse trains surface scan processing. An application of structural colors presents the functionality of our method.

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“…This structure improved information density, thus facilitating the recording of three bits of information inside nanoporous glass. Cerkauskaite et al [144] obtained 120-nm periodic deep subwavelength ripples on indium-tin-oxide thin film by means of femtosecond laser direct writing. The form birefringence was much higher than that of uniaxial crystals and fused-quartz nanostructures.…”

Section: Data Storage Materials and Devicesmentioning

confidence: 99%

Femtosecond Laser Micro/Nano-manufacturing: Theories, Measurements, Methods, and Applications

et al. 2020

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Femtosecond laser fabrication has grown to be a major method of extreme manufacturing because of the extreme energy density and spatial and temporal scales of femtosecond lasers. The physical effects and the mechanism of interaction between femtosecond lasers and materials are distinct from those in traditional processes. The nonlinear and nonequilibrium effects of the interaction have given rise to new concepts, principles, and methods, such as femtosecond pulse durations are shorter than many physical/chemical characteristic times, which permits manipulating, adjusting, or interfering with electron dynamics. These new concepts and methods have broad application prospects in micro/nanofabrication, chemical synthesis, material processing, quantum control, and other related fields. This review discusses the cutting-edge theories, methods, measurements, and applications of femtosecond lasers to micro/nano-manufacturing. The key to future development of femtosecond laser manufacturing lies in revealing its fabrication mechanism from the electronic level and precisely regulating the electronic dynamics.

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Form-Birefringence in ITO Thin Films Engineered by Ultrafast Laser Nanostructuring

Cited by 51 publications

References 38 publications

Anisotropic Resistivity Surfaces Produced in ITO Films by Laser‐Induced Nanoscale Self‐organization

Anisotropic Resistivity Surfaces Produced in ITO Films by Laser‐Induced Nanoscale Self‐organization

Manipulation of LIPSS orientation on silicon surfaces using orthogonally polarized femtosecond laser double-pulse trains

Femtosecond Laser Micro/Nano-manufacturing: Theories, Measurements, Methods, and Applications

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