Formation and characterization of ZnO : Tm⁺optical waveguides fabricated by Tm⁺and O⁺ion implantation

Abstract

Planar optical waveguides were formed in ZnO crystal by Tm+ and O+ ion implantation. The distributions of Tm+ in as-implanted and annealed ZnO samples were investigated by the RBS technique. A shift of the Tm+ peak towards the sample surface and out diffusion were observed after thermal treatment and subsequent O+ ion implantation. Waveguide formation was determined after O+ implantation in Tm+-implanted ZnO crystal. By using the prism-coupling method two guided modes were detected. The refractive index profile in the implanted waveguide was reconstructed according to the SRIM and RCM simulation. The RBS/channelling measurements show that the lattice structure of ZnO did not suffer detectable damage after O+ implantation.

The Damage Analysis of Nd:YVO4 Crystal Implanted by He+ Ions at Low Energy

“…It can be found that the experimental depth of damage peak is in good agreement with the theoretical predication, which is located at around 0.85μm below sample surface. The FWHM of practical damage profile is broader than that of simulation result, it is normal and can be found in other reports [13] Implantation with three different He + -ion doses doesn't result in dramatic lattice damage. The highest damage ratio of sample 1 is lower than 10%, even for the implantation at dose of as high as 4×10 16 ions/cm 2 , the induced peak damage ratio is only about 15%.…”

Preparation and Electrochemical Performance of ZnO Films as Anode Materials for Li-Ion Batteries

“…Zinc oxide has attracted extensive interest because of its important role in various applications, for example, gas sensor [2], surface acoustic wave devices [3], optical waveguides [4] as well as blue/UV light emitting devices [5]. Compared to other kinds of nanostructured lms, the ZnO lms have the advantages of structural versatility, easy fabrication and availability, which make them ideal templates for nanostructure construction [6,7].…”