Formation of alkylsiloxane self-assembled monolayers on Si3N4

Sung, Myung Mo; Kluth, G. Jonathan; Maboudian, Roya

doi:10.1116/1.581616

Cited by 49 publications

(41 citation statements)

References 17 publications

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“…As their original surface properties exhibit hydrophilicity (water contact angle is 46.7° (Thomas 1996), 30° (Sung et al 1999), and 40.8° (Tan et al 2005) for SiO 2 , Si 3 N 4 and BST, respectively), normally they have to work with a hydrophobic top-coating layer such as Teflon Ò AF 1600 for electrowetting actuation. The prime advantages of SiO 2 as a capacitive insulator are its high dielectric constant, high dielectric strength and availability as one of the predominant materials in the MEMS and microelectronics industries.…”

Section: Polymeric and Inorganic Dielectricsmentioning

confidence: 99%

Dielectric materials for electrowetting-on-dielectric actuation

Liu

Dharmatilleke²,

Maurya

et al. 2009

Microsyst Technol

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The fundamental building blocks of typical electrowetting-on-dielectric (EWOD) actuation and their importance in the EWOD mechanism are introduced and reviewed, respectively. The emphasis in this experimental study of EWOD is on dielectric materials, upon which the performance of EWOD devices is heavily dependent. Dielectric breakdown of several typical polymeric and inorganic insulators employed as dielectrics for EWOD has been analytically investigated, which is forced to occur between the electrodes and conductive liquids under certain threshold potential. The electric breakdown occurring in both dielectric layer and surrounding medium (air or silicon oil) has been studied to build up a mathematical model of breakdown voltage as a function of dielectric thickness. Contact angle measurement of some polymeric materials and self-assembled monolayer using pure water has been carried out to demonstrate the contact angle tunability and reversibility, respectively, upon EWOD actuation.

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Section: Polymeric and Inorganic Dielectricsmentioning

confidence: 99%

Dielectric materials for electrowetting-on-dielectric actuation

Liu

Dharmatilleke²,

Maurya

et al. 2009

Microsyst Technol

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“…However, the bus between the digits and the bonding pads remained covered and electrically isolated from the test environment or material under test. Si 3 N 4 is a superior insulator to SiO 2 , spin-on glass (SoG) or polyimide in high performance biosensor applications because of its robust physical properties and excellent water and ion barrier properties (Sung et al 1999). The Si 3 N 4 serves as an insulator and a chemical barrier to electrically/electrochemically isolate the buses to the fingers and effectively passivates the device except for the signal generating digits.…”

Section: Design and Fabrication Of Imesmentioning

confidence: 99%

Design considerations in the use of interdigitated microsensor electrode arrays (IMEs) for impedimetric characterization of biomimetic hydrogels

Yang

Guiseppi-Wilson²,

Guiseppi‐Elie

2010

Biomed Microdevices

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Microlithographically fabricated interdigitated microsensor electrodes (IMEs) were cleaned, surface activated, chemically functionalized (amine) and derivatized with an Acrloyl-PEG-NHS to receive a spun-applied monomer cocktail of UV polymerizable monomer. IMEs were 2050.5, 1550.5, 1050.5 and 0550.5 possessing lines and spaces that were 20, 15, 10, and 5 μm respectively; 5 mm line lengths and were 50 lines on each opposing bus. Bioactive hydrogels were synthesized from spun-applied and UV-crosslinked tetraethyleneglycol diacrylate (TEGDA) (crosslinker), 2-hydroxyethylmethacrylate (HEMA), polyethyleneglycol(200) monomethacrylate (PEGMA), N-[tris(hydroxymethyl)methyl]-acrylamide (HMMA) and poly(HEMA) (MW 60,000) (viscosity modifier) and 2,2-dimethoxy-2-phenylacetophenone (DMPA) (photoinitiator) to produce a 5 μm thick p(HEMA-co-PEGMA-co-HMMA) hydrogel membrane on the IMEs. Unmodified and hydrogel coated IMEs where characterized by AC electrical impedance spectroscopy using 50 mV p-t-p over the frequency range from 10 Hz to 100 kHz in aqueous PBS 7.4 buffer and in buffer containing 50 mM [Fe(CN)(6)](3-/4- ) solution at RT. Impedimetric responses were found to scale with the device geometric parameters. Equivalent circuit modeling revealed deviations from ideality at lower device dimensions suggesting an implication of the substrate surface charge on the double layer capacitance of the electrodes. Diffusion coefficients derived from the Warburg component are in accord with literature values.

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“…Removing the oxide layer of silicon nitride tips with hydrofluoric acid helps in the formation of silane monolayers [135,136].…”

Section: Modificationmentioning

confidence: 99%