2017
DOI: 10.1002/cphc.201700407
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Formation of BiFeO3 from a Binary Oxide Superlattice Grown by Atomic Layer Deposition

Abstract: We report on the growth of polycrystalline BiFeO thin films on SiO /Si(001) and Pt(111) substrates by atomic layer deposition using the precursors ferrocene, triphenyl-bismuth, and ozone. By growing alternating layers of Fe O and Bi O , we employ a superlattice approach and demonstrate an efficient control of the cation stoichiometry. The superlattice decay and the resulting formation of polycrystalline BiFeO films are studied by in situ X-ray diffraction, in situ X-ray photoelectron spectroscopy, and transmis… Show more

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Cited by 11 publications
(11 citation statements)
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“…This strategy is different from previous investigations on the formation and films due to minimized diffusion requirements and suppressing the formation of larger Bi 2 O 3 regions, which were found to be partially crystallized at a deposition temperature of 290 °C. 29 At the initial stage of the in situ TEM annealing process, the as-deposited BiFeO 3 film on the (001)-oriented SrTiO 3 /Si substrate was heated up to 250 °C, which is 30 °C above the deposition temperature. Although the majority of the BiFeO 3 layer remained in the amorphous state, a thin crystalline layer of the ALD-grown BiFeO 3 film at the interphase to the SrTiO 3 layer was already present (Figure 1).…”
Section: ■ Results and Discussionmentioning
confidence: 99%
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“…This strategy is different from previous investigations on the formation and films due to minimized diffusion requirements and suppressing the formation of larger Bi 2 O 3 regions, which were found to be partially crystallized at a deposition temperature of 290 °C. 29 At the initial stage of the in situ TEM annealing process, the as-deposited BiFeO 3 film on the (001)-oriented SrTiO 3 /Si substrate was heated up to 250 °C, which is 30 °C above the deposition temperature. Although the majority of the BiFeO 3 layer remained in the amorphous state, a thin crystalline layer of the ALD-grown BiFeO 3 film at the interphase to the SrTiO 3 layer was already present (Figure 1).…”
Section: ■ Results and Discussionmentioning
confidence: 99%
“…This observation is consistent with our previous study of the crystallization behavior of BFO from Bi 2 O 3 −Fe 2 O 3 superlattices, where most of the several-nanometer-thick layers of Bi 2 O 3 were already crystalline after the deposition, whereas the Fe 2 O 3 layers remained amorphous. 29 Subsequent heating was performed at a rate of 5 °C/min up to 300 °C. The ordering in the semicrystalline sublayer improved toward the (001) orientation imposed by the substrate.…”
Section: ■ Results and Discussionmentioning
confidence: 99%
“…In Equation (8), the area of the layer ∆S is 0.65 µm 2 and the calculated excess of potential energy ∆E is 4,2 fJ. The observed phenomena were reversible when the "bubbles" maintained their ellipsoid shape.…”
Section: Discussionmentioning
confidence: 99%
“…Substituting location a Figure 6b, the surface tension σ is equal to 6.4 mN/m. Based on the available data, one can also calculate other parameters, for example, the change in potential energy of the surface molecules by Equation (8):…”
Section: Discussionmentioning
confidence: 99%
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