Formation of blisters in thin metal films on lithium niobate implanted by keV Ar+ ions

Abstract

Bubble-like and crater-like blisters were observed at the boundaries of the structures "thin Ni film-lithium niobate" and "thin Pd film-lithium tantalate" implanted by Ar + ions. Analyses of these systems by AFM and SEM have shown that ion implantation essentially modifies near-surface structures with changing their optical, electrical and mechanical properties. Differences in the optical properties and surface structure between implanted and non-implanted systems are observed and explained by different properties of materials, widening interface "film-substrate" as well as by other known effects and phenomena. Enhanced adhesion of these films to substrate, nonselective spectral response is a base for effective and perspective application of the systems in development of high-sensitive pyroelectric detectors with a wide spectral range and high optical damage threshold.