2009
DOI: 10.12693/aphyspola.116.s-82
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Formation of Excess Silicon on 6H-SiC(0001) during Hydrogen Etching

Abstract: The surface of 6H-SiC(0001) samples was subjected to etching under H 2 /Ar gas mixture in a cold-wall tubular furnace. Its topography and properties were characterized by atomic force microscopy and X-ray photoelectron spectroscopy before and after hydrogen etching. The conditions have been found, under which surface polishing-related damages could be removed. Si droplets were observed under certain etching conditions. The effect of the samples' cooling rate on the obtained surface morphology and chemistry was… Show more

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Cited by 9 publications
(6 citation statements)
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“…The main differences between gSi 800°C and gSi 950°C and the rest of the samples (bCF, gCF) could be identified as well from the Si 2p XPS spectra. From the deconvolution of the Si 2p spectra, Si–C bonds were clearly observed in gSi 800°C and gSi 950°C around 101.20 and 101.16 eV, respectively 41 ( Table 4 ), indicating the formation of SiC nanocrystals, confirming their observation from the TEM analysis.…”
Section: Resultssupporting
confidence: 73%
“…The main differences between gSi 800°C and gSi 950°C and the rest of the samples (bCF, gCF) could be identified as well from the Si 2p XPS spectra. From the deconvolution of the Si 2p spectra, Si–C bonds were clearly observed in gSi 800°C and gSi 950°C around 101.20 and 101.16 eV, respectively 41 ( Table 4 ), indicating the formation of SiC nanocrystals, confirming their observation from the TEM analysis.…”
Section: Resultssupporting
confidence: 73%
“…The former can be attributed to the metallic Si 0 (Si–Si bonding) while the latter is the characteristic peak for Si–C bonding. [ 33,34 ] The C 1s spectrum is characterized by a single peak at 283.0 eV. This suggests our CVD grown SiC layer is a mixture of Si and SiC which leads to the unique switching performance of the memristor.…”
Section: Resultsmentioning
confidence: 97%
“…The spectra of rSG materials are presented in Figure 4 f–h. Unlike hybrid reduced materials, the XPS spectra of these samples only exhibit the peaks related to Si-Si species and SiO 2 (at 99.5 eV and 103.5 eV, respectively) [ 47 , 48 ]. As reported in Table 3 , rSG-1 material contains the lowest percentage of nonreduced Si species (ca.…”
Section: Resultsmentioning
confidence: 99%