Formation of Large 2D Arrays of Shape‐Controlled Colloidal Nanoparticles at Variable Interparticle Distances

Ullrich, Simon; Scheeler, Sebastian P.; Pacholski, Claudia; Spatz, Joachim P.; Kudera, Stefan

doi:10.1002/ppsc.201200065

Cited by 30 publications

(35 citation statements)

References 39 publications

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“…Gold nano particles were wet-chemically synthesized in water [19] or toluene [20] using seeding growth approaches. The resulting Au nano particles were equipped with a polystyrene shell by ligand exchange and subsequently spin-coated onto clean silicon substrates according to reference [19], [20]. In figure 1 a representative scanning electron microscopy (SEM) image of a prepared Au nano particle array and the size distribution of the Au nano particles determined by transmission electron microscopy (TEM) image analysis are displayed.…”

Section: Methods and Experimentalmentioning

confidence: 99%

Enhanced sputter yields of ion irradiated Au nano particles: energy and size dependence

Holland-Moritz¹,

Scheeler²,

Stanglmair³

et al. 2015

Nanotechnology

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Hexagonally arranged Au nanoparticles exhibiting a broad Gaussian-shaped size distribution ranging from 30 nm to 80 nm were deposited on Si substrates and irradiated with Ar(+) and Ga(+) ions with various energies from 20 to 350 keV and 1 to 30 keV, respectively. The size and energy dependence of the sputter yield were measured using high-resolution scanning electron microscopy image analysis. These results were compared to simulation results obtained by iradina, a Monte Carlo code, which takes the specifics of the nano geometry into account. The experimental sputter yields are significantly higher than simulated sputter yields for both bulk and the nano geometry. The difference can be clearly attributed to thermally driven effects, which significantly increase the measured sputter yields.

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Section: Methods and Experimentalmentioning

confidence: 99%

Enhanced sputter yields of ion irradiated Au nano particles: energy and size dependence

Holland-Moritz¹,

Scheeler²,

Stanglmair³

et al. 2015

Nanotechnology

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“…The gold NP arrays on a Si substrate with a native oxide layer were fabricated by wet-chemical synthesis of Au NPs using seed growth and spin-coating [35]. The irradiation experiments presented in this work were adapted from [31] and performed in a FIB system using 30 keV Ga + ions.…”

Section: Methodsmentioning

confidence: 99%

Sputtering and redeposition of ion irradiated Au nanoparticle arrays: direct comparison of simulations to experiments

Holland-Moritz¹,

Il'inov

Djurabekova

et al. 2017

New J. Phys.

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Ion beam processing of surfaces is well known to lead to sputtering, which conventionally is associated only with erosion of atoms from the material. We show here, by combination of experiments and a newly developed Monte Carlo algorithm, that in the case of nanoparticles in a regular twodimensional array on surfaces, the redeposition of sputtered atoms may play a significant role on the system development. The simulations are directly compared to in situ experiments obtained using a dual focused Ga + ion beam system and high resolution scanning electron microscopy, and explain the size evolution by a combination of sputtering and redeposition of sputtered material on neighboring particles. The effect is found to be dependent on the size of the nanoparticles: if the nanoparticle size is comparable to the ion range, the reposition is negligible. For larger nanoparticles the redeposition becomes significant and is able to compensate up to 20% of the sputtered material, effectively reducing the process of sputtering. The redeposition may even lead to significant growth: this was seen for the nanoparticles with the sizes much smaller than the ion range. Furthermore, the algorithm shows that significant redeposition is possible when the large size neighboring nanoparticles are present.

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“…The resulting Au NPs were covered with a polystyrene shell by ligand exchange and subsequently spin-coated onto clean silicon substrates according to [19,20]. In figure 1(a), a representative scanning electron microscopy (SEM) image of a prepared Au NP array and the size distribution of the Au nanoparticles determined by transmission electron microscopy (TEM) image analysis are displayed.…”

Section: Methods and Experimentsmentioning

confidence: 99%

Effect of Electron Flow Direction and Via Number on Electromigration Mechanism for Copper Dual Damascene Interconnects

Cheng¹,

Shiau²,

Chung³

et al. 2010

Jpn. J. Appl. Phys.

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Hexagonally arranged Au nanoparticles exhibiting a broad Gaussian-shaped size distribution ranging from 30 nm to 80 nm were deposited on Si substrates and irradiated with Ar + and Ga + ions with various energies from 20 to 350 keV and 1 to 30 keV, respectively. The size and energy dependence of the sputter yield were measured using high-resolution scanning electron microscopy image analysis. These results were compared to simulation results obtained by iradina, a Monte Carlo code, which takes the specifics of the nano geometry into account. The experimental sputter yields are significantly higher than simulated sputter yields for both bulk and the nano geometry. The difference can be clearly attributed to thermally driven effects, which significantly increase the measured sputter yields.

show abstract

Formation of Large 2D Arrays of Shape‐Controlled Colloidal Nanoparticles at Variable Interparticle Distances

Cited by 30 publications

References 39 publications

Enhanced sputter yields of ion irradiated Au nano particles: energy and size dependence

Enhanced sputter yields of ion irradiated Au nano particles: energy and size dependence

Sputtering and redeposition of ion irradiated Au nanoparticle arrays: direct comparison of simulations to experiments

Effect of Electron Flow Direction and Via Number on Electromigration Mechanism for Copper Dual Damascene Interconnects

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